EINDHOVEN
Netherlands
46
2026-06-25
The entities that hold a legal rights for patent applications filed by inventor HUISMAN SIMON REINALD:
SIMON REINALD HUISMAN from EINDHOVEN, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING METROLOGY SYSTEM AND METHOD
#2 | 2026-04-30ENHANCED ALIGNMENT APPARATUS FOR LITHOGRAPHIC SYSTEMS
#3 | 2025-11-06CONFIGURABLE PRINTED OPTICAL ROUTING FOR PARALLEL OPTICAL DETECTION
#4 | 2025-11-06METROLOGY SYSTEM USING MULTIPLE RADIATION SPOTS
#5 | 2025-05-08DETERMINING A MEASUREMENT RECIPE IN A METROLOGY METHOD
#6 | 2025-02-20AN OPTICAL SYSTEM IMPLEMENTED IN A SYSTEM FOR FAST OPTICAL INSPECTION OF TARGETS
#7 | 2025-02-13ENHANCED ALIGNMENT FOR A PHOTOLITHOGRAPHIC APPARATUS
#8 | 2025-01-30TARGET ASYMMETRY MEASUREMENT FOR SUBSTRATE ALIGNMENT IN LITHOGRAPHY SYSTEMS
#9 | 2024-10-24METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD
#10 | 2024-07-18METROLOGY METHOD AND SYSTEM AND LITHOGRAPHIC SYSTEM
#11 | 2024-03-21METROLOGY METHOD AND SYSTEM AND LITHOGRAPHIC SYSTEM
#12 | 2024-03-21INTENSITY ORDER DIFFERENCE BASED METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
#13 | 2024-01-25METROLOGY SYSTEM AND COHERENCE ADJUSTERS
#14 | 2023-12-28Metrology system and lithographic system
#15 | 2023-10-26LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, AND METHODS THEREOF
#16 | 2023-07-20ILLUMINATION APPARATUS AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
#17 | 2023-07-06LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING METROLOGY SYSTEM AND METHOD
#18 | 2023-01-12Overlay measurement system using lock-in amplifier technique
#19 | 2022-12-15Phase modulators in alignment to decrease mark size
#20 | 2022-12-15Metrology method and lithographic apparatuses
#21 | 2022-12-01Alignment method
#22 | 2022-11-03METROLOGY MARK STRUCTURE AND METHOD OF DETERMINING METROLOGY MARK STRUCTURE
#23 | 2022-09-22Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element
#24 | 2022-09-08METROLOGY SYSTEM AND METHOD
#25 | 2022-04-21Metrology method and associated metrology and lithographic apparatuses
#26 | 2022-03-31APPARATUS FOR AND METHOD OF SIMULTANEOUSLY ACQUIRING PARALLEL ALIGNMENT MARKS
#27 | 2022-02-24Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter
#28 | 2022-02-03Metrology sensor for position metrology
#29 | 2021-12-09Detection system for an alignment sensor
#30 | 2021-09-02Sensor apparatus and method for lithographic measurements
#31 | 2021-08-05Alignment method and apparatus
#32 | 2021-05-27Metrology sensor, lithographic apparatus and method for manufacturing devices
#33 | 2021-05-06Alignment sensor apparatus for process sensitivity compensation
#34 | 2021-04-29Position sensor
#35 | 2021-03-11Level sensor and lithographic apparatus
#36 | 2020-07-30Alignment measurement system
#37 | 2020-05-07Alignment measurement system
#38 | 2020-04-02Metrology sensor, lithographic apparatus and method for manufacturing devices
#39 | 2020-03-19Metrology sensor, lithographic apparatus and method for manufacturing devices
#40 | 2019-11-21Method and apparatus for measuring a structure on a substrate
#41 | 2019-10-03Radiation source
#42 | 2019-07-11Position sensor, lithographic apparatus and method for manufacturing devices
#43 | 2019-03-21Method of measuring a parameter and apparatus
#44 | 2019-02-14Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
#45 | 2018-05-31Alignment system
#46 | 2018-04-12Blade set and hair cutting appliance
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