Eindhoven
Netherlands
30
2026-02-26
The entities that hold a legal rights for patent applications filed by inventor VLES David Ferdinand:
David Ferdinand VLES from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
#2 | 2024-09-12METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION
#3 | 2024-01-25Pellicle and pellicle assembly
#4 | 2024-01-04MEMBRANE FOR EUV LITHOGRAPHY
#5 | 2023-10-12Metal-silicide-nitridation for stress reduction
#6 | 2023-10-05MEMBRANE CLEANING APPARATUS
#7 | 2023-05-04Substrate support, lithographic apparatus and loading method
#8 | 2022-09-01PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
#9 | 2022-08-11Pellicle and pellicle assembly
#10 | 2022-06-16Metal-silicide-nitridation for stress reduction
#11 | 2022-04-21Pellicle and pellicle assembly
#12 | 2022-01-13Membrane cleaning apparatus
#13 | 2021-07-08Pellicle and pellicle assembly
#14 | 2021-06-17Metal-silicide-nitridation for stress reduction
#15 | 2021-04-15Membrane for EUV lithography
#16 | 2020-12-31Graphene pellicle lithographic apparatus
#17 | 2020-10-08Pellicle frame and pellicle assembly
#18 | 2020-07-02Pellicle and pellicle assembly
#19 | 2020-05-21Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
#20 | 2020-05-07Alignment measurement system
#21 | 2020-02-27Pellicle and pellicle assembly
#22 | 2020-02-27Sensor mark and a method of manufacturing a sensor mark
#23 | 2019-07-25Lithographic apparatus
#24 | 2019-05-02Membrane for EUV lithography
#25 | 2019-04-18Substrate support, lithographic apparatus and loading method
#26 | 2019-02-21Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
#27 | 2019-01-10Membrane for EUV lithography
#28 | 2018-12-27Membrane assembly
#29 | 2018-12-20Pellicle and pellicle assembly
#30 | 2018-08-23Method for manufacturing a membrane assembly
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