Hui Chen

Local area polishing system and polishing pad assemblies for a polishing system

Polishing system with local area rate control and oscillation mode

DESIGN OF DISK/PAD CLEAN WITH WAFER AND WAFER EDGE/BEVEL CLEAN MODULE FOR CHEMICAL MECHANICAL POLISHING

Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning

VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION

Double sided buff module for post CMP cleaning

SCRUBBER BRUSH FORCE CONTROL ASSEMBLIES, APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

Disk/pad clean with wafer and wafer edge/bevel clean module for chemical mechanical polishing

DISC-BRUSH HOLDER APPARATUS, DISC-BRUSH ASSEMBLY, AND SUBSTRATE PROCESSING METHODS

Methods and apparatus for pre-chemical mechanical planarization buffing module

METHODS AND APPARATUS FOR ISOLATING A RUNNING BEAM CONVEYOR FROM A SEMICONDUCTOR SUBSTRATE CLEANING ENVIRONMENT

High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods

ANTI-SLIP SCRUBBER BRUSH AND ASSEMBLY METHODS

CONDITIONING A PAD IN A CLEANING MODULE

BRUSH BOX MODULE FOR CHEMICAL MECHANICAL POLISHING CLEANER

Disk-brush cleaner module with fluid jet

Brush alignment control mechanism

DUAL CHAMBER MEGASONIC CLEANER

Seal installation tool

DRIVE ROLLER FOR A CLEANING SYSTEM

LID FOR A SEMICONDUCTOR DEVICE PROCESSING APPARATUS AND METHODS FOR USING THE SAME

LID FOR A SEMICONDUCTOR DEVICE PROCESSING APPARATUS AND METHODS FOR USING THE SAME

METHODS AND APPARATUS FOR FINDING A SUBSTRATE NOTCH CENTER

Scrubber box and methods for using the same

Clamping Mechanism

HORIZONTAL MEGASONIC MODULE FOR CLEANING SUBSTRATES

SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING

MULTIPLE SUBSTRATE VAPOR DRYING SYSTEMS AND METHODS

METHODS AND APPARATUS FOR SUPPORTING A SUBSTRATE IN A HORIZONTAL ORIENTATION DURING CLEANING

Methods and apparatus for detecting a substrate notch or flat

Scrubber brush with sleeve and brush mandrel for use with the scrubber brush

METHOD AND APPARATUS FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES IN A CLEANING MODULE

Lid for a semiconductor device processing apparatus and methods for using the same

Load cup for chemical mechanical polishing

Scrubber box