De Bilt
Netherlands
26
2019-03-21
The entities that hold a legal rights for patent applications filed by inventor UITTERDIJK Tammo:
Tammo UITTERDIJK from De Bilt, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#2 | 2017-06-08Lithographic apparatus and device manufacturing method
#3 | 2014-11-27Lithographic apparatus and device manufacturing method
#4 | 2014-03-13Lithographic apparatus and device manufacturing method
#5 | 2013-07-11Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor
#6 | 2012-01-12Lithographic apparatus, control system and device manufacturing method
#7 | 2011-11-17Lithographic apparatus and device manufacturing method
#8 | 2011-06-30Lithographic apparatus and device manufacturing method
#9 | 2010-07-22Passive reticle tool, a lithographic apparatus and a method of patterning a device in a lithography tool
#10 | 2010-05-13Lithographic projection system and projection lens polarization sensor
#11 | 2010-02-25Lithographic Apparatus, Method for Determining at Least One Polarization Property Thereof, Polarization Analyzer and Polarization Sensor Thereof
#12 | 2008-10-23Lithographic apparatus and device manufacturing method
#13 | 2008-09-04Lithographic apparatus, aberration correction device and device manufacturing method
#14 | 2008-06-12Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
#15 | 2007-12-27Method of reducing a wave front aberration, and computer program product
#16 | 2007-09-13Lithographic apparatus, control system and device manufacturing method
#17 | 2007-07-03Lithographic apparatus and device manufacturing method
#18 | 2007-02-15Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby
#19 | 2006-09-14Lithographic apparatus and a method for determining a polarization property
#20 | 2006-08-31Lithographic apparatus
#21 | 2006-07-20Lithographic apparatus and device and device manufacturing method
#22 | 2006-06-29Lithographic apparatus and device manufacturing method
#23 | 2006-05-25Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle
#24 | 2005-12-22Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
#25 | 2005-09-22Lithographic apparatus and methods for use thereof
#26 | 2005-06-30Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
332646 ⎘