Koshi
Japan
7
2015-07-02
The entities that hold a legal rights for patent applications filed by inventor Ueda Issei:
Issei Ueda from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus
#2 | 2014-08-21Substrate transfer device, substrate processing apparatus, and substrate accommodation method
#3 | 2011-12-22Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program
#4 | 2011-05-05Substrate processing apparatus
#5 | 2010-12-02Coating and developing apparatus
#6 | 2009-01-01Substrate processing system
#7 | 2007-03-15Coating and developing apparatus
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