Nigel P. Smith

City:

Hsinchu

Country:

Taiwan

Published Applications:

Last publication date:

2011-03-24

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Nigel P. Smith from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:

Multilayer alignment and overlay target and measurement method

Multi layer alignment and overlay target and measurement method

Imaging Diffraction Based Overlay

Determining overlay error using an in-chip overlay target

Multi layer alignment and overlay target and measurement method

Overlay Metrology Mark

Multi-layer alignment and overlay target and measurement method

InventorID:

3522104 ⎘