Dresden
Germany
5
2010-03-04
The entities that hold a legal rights for patent applications filed by inventor Trogisch Sven:
Sven Trogisch from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Metrology Mark with Elements Arranged in a Matrix, Method of Manufacturing Same and Alignment Method
#2 | 2009-04-16Lithography Apparatus, Masks for Non-Telecentric Exposure and Methods of Manufacturing Integrated Circuits
#3 | 2009-04-16Non-Telecentric Lithography Apparatus and Method of Manufacturing Integrated Circuits
#4 | 2009-01-08Lithography mask, rewritable mask, process for manufacturing a mask, device for processing a substrate, lithographic system and a semiconductor device
#5 | 2008-03-06Filter system for light source
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