Dresden
Germany
6
2010-08-12
The entities that hold a legal rights for patent applications filed by inventor Tschischgale Joerg:
Joerg Tschischgale from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical system of a microlithographic projection exposure apparatus
#2 | 2010-03-04Metrology Mark with Elements Arranged in a Matrix, Method of Manufacturing Same and Alignment Method
#3 | 2009-04-16Non-Telecentric Lithography Apparatus and Method of Manufacturing Integrated Circuits
#4 | 2007-10-04Arrangement for the transfer of structural elements of a photomask onto a substrate and method therefor
#5 | 2006-11-16Method for exposing a semiconductor wafer by applying periodic movement to a component
#6 | 2006-02-02Optical system of a microlithographic projection exposure apparatus
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