Brooklyn, New York
United States
7
2010-03-04
The entities that hold a legal rights for patent applications filed by inventor Khmelichek Aleksandr:
Aleksandr Khmelichek from Brooklyn, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Liquid immersion lithography system comprising a tilted showerhead relative to a substrate
#2 | 2007-03-29Adjustable resolution interferometric lithography system
#3 | 2007-02-22Liquid immersion lithography system with tilted liquid flow
#4 | 2006-10-26Liquid immersion lithography system having a tilted showerhead relative to a substrate
#5 | 2006-10-19Liquid immersion lithography system with tilted liquid flow
#6 | 2006-08-03Interferometric lithographic projection apparatus
#7 | 2006-03-02Adjustable resolution interferometric lithography system
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