Milpitas, California
United States
12
2010-02-18
The entities that hold a legal rights for patent applications filed by inventor Yang Weidong:
Weidong Yang from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Computation efficiency by diffraction order truncation
#2 | 2009-03-24Local process variation correction for overlay measurement
#3 | 2009-03-05Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology
#4 | 2009-03-05Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology
#5 | 2007-06-26Alignment target to be measured with multiple polarization states
#6 | 2007-06-12Alignment target with designed in offset
#7 | 2006-05-16Positioning two elements using an alignment target with a designed offset
#8 | 2006-01-31Measuring an alignment target with a single polarization state
#9 | 2006-01-03Method and apparatus for using an alignment target with designed in offset
#10 | 2005-11-29Encoder measurement based on layer thickness
#11 | 2005-10-25Encoder with an alignment target
#12 | 2005-09-27Measuring an alignment target with multiple polarization states
3758243 ⎘