Yasuhiro Tobe

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2010-02-25

Top Assignees for applications by Yasuhiro Tobe

The entities that hold a legal rights for patent applications filed by inventor Tobe Yasuhiro:

Yasuhiro Tobe from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus

DEPOSITION APPARATUS, DEPOSITION SYSTEM AND DEPOSITION METHOD

Dual-chamber plasma processing apparatus

InventorID:

3759267 ⎘