Sandy Hook, Connecticut
United States
5
2010-08-26
The entities that hold a legal rights for patent applications filed by inventor McCafferty Diane:
Diane McCafferty from Sandy Hook, US has applied for patents for these inventions. The list has both pending applications and granted patents:
FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
#2 | 2009-08-27Re-flow and buffer system for immersion lithography
#3 | 2009-07-23Immersion lithographic apparatus with immersion fluid re-circulating system
#4 | 2008-06-12Systems and methods for thermally-induced aberration correction in immersion lithography
#5 | 2008-06-05Lithographic apparatus and device manufacturing method
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