MASAEI SUWADA

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2009-10-08

Top Assignees for applications by MASAEI SUWADA

The entities that hold a legal rights for patent applications filed by inventor SUWADA MASAEI:

MASAEI SUWADA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Wafer processing apparatus with wafer alignment device

Position sensor system for substrate transfer robot

Cluster type semiconductor processing apparatus

Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same

Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections

InventorID:

3921201 ⎘