Japan
7
2010-07-15
7
2012-04-10
These are the the leading inventors for applications assigned to ASM Japan K.K.:
ASM Japan K.K. based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method for controlling flow and concentration of liquid precursor
#2 | 2010-04-15 ✅ Patent 8,133,555 granted on 2012-03-13Method for forming metal film by ALD using beta-diketone metal complex
#3 | 2009-11-05 ✅ Patent 7,632,549 granted on 2009-12-15Method of forming a high transparent carbon film
#4 | 2009-04-09 ✅ Patent 8,041,450 granted on 2011-10-18Position sensor system for substrate transfer robot
#5 | 2006-10-12 ✅ Patent 7,534,469 granted on 2009-05-19Semiconductor-processing apparatus provided with self-cleaning device
#6 | 2005-10-18 ✅ Patent 6,955,741 granted on 2005-10-18Semiconductor-processing reaction chamber
#7 | 2005-06-14 ✅ Patent 6,905,981 granted on 2005-06-14Low-k dielectric materials and processes
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