Munich
Germany
3
2009-12-24
The entities that hold a legal rights for patent applications filed by inventor Scheuring Gerd:
Gerd Scheuring from Munich, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and device for inspecting a disk-shaped object
#2 | 2008-03-20Method for an automatic optical measuring of an OPC structure
#3 | 2005-04-21Apparatus for measuring feature widths on masks for the semiconductor industry
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