Ebsdorfergrund
Germany
3
2008-03-13
The entities that hold a legal rights for patent applications filed by inventor Spill Burkhard:
Burkhard Spill from Ebsdorfergrund, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for Selecting a Wavelength, and a Microscope
#2 | 2006-02-28Apparatus and method for reducing the electron-beam-induced deposition of contamination products
#3 | 2005-10-13Apparatus and method for the determination of positioning coordinates for semiconductor substrates
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