Nigel Peter Smith

City:

Hsinchu

Country:

Taiwan

Published Applications:

Last publication date:

2008-09-11

Top Assignees for applications by Nigel Peter Smith

The entities that hold a legal rights for patent applications filed by inventor Smith Nigel Peter:

Nigel Peter Smith from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:

Overlay measurement target

Method for measuring dimensions and optical system using the same

Overlay metrology mark

Methods and systems for determining overlay error based on target image symmetry

Overlay measurement target

InventorID:

4249497 ⎘