Hayward, California
United States
4
2007-01-04
The entities that hold a legal rights for patent applications filed by inventor Liebchen Armin:
Armin Liebchen from Hayward, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems
#2 | 2006-04-25Method and apparatus for providing lens aberration compensation by illumination source optimization
#3 | 2006-03-02Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems
#4 | 2005-02-03Method, program product and apparatus of simultaneous optimization for NA-Sigma exposure settings and scattering bars OPC using a device layout
4327094 ⎘