Chandler, Arizona
United States
2
2007-08-23
The entities that hold a legal rights for patent applications filed by inventor Chen Ting:
Ting Chen from Chandler, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for decomposition of a customized DOE for use with a single exposure into a set of multiple exposures using standard DOEs with optimized exposure settings
#2 | 2006-09-21Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation
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