Irvine, California
United States
15
2008-03-25
The entities that hold a legal rights for patent applications filed by inventor Brown Kyle A.:
Kyle A. Brown from Irvine, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
#2 | 2007-03-27Methods and systems for determining a thin film characteristic and an electrical property of a specimen
#3 | 2006-11-21Methods and systems for determining a composition and a thickness of a specimen
#4 | 2006-10-31Methods and systems for determining an adhesion characteristic and a thickness of a specimen
#5 | 2006-09-12Methods and systems for determining a presence of defects and a thin film characteristic of a specimen
#6 | 2006-04-06Methods and systems for determining a presence of macro and micro defects on a specimen
#7 | 2006-02-28Methods and systems for determining overlay and flatness of a specimen
#8 | 2006-01-17Methods and systems for lithography process control
#9 | 2005-09-27Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen
#10 | 2005-09-20Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process
#11 | 2005-07-19Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen
#12 | 2005-07-12Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process
#13 | 2005-07-12Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen
#14 | 2005-05-10Methods and systems for determining a critical dimension and overlay of a specimen
#15 | 2005-05-10Methods and systems for determining an implant characteristic and a presence of defects on a specimen
4602396 ⎘