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Inventor profile of:

Hiroshi Sobukawa

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2023-06-08

Top Assignees for applications by Hiroshi Sobukawa

The entities that hold a legal rights for patent applications filed by inventor Sobukawa Hiroshi:

Ebara Corporation 12 Tokyo, Japan
KABUSHIKI KAISHA TOPCON 2 Tokyo, Japan
Gigaphton Inc. 1 Tochigi, Japan
GIGAPHOTON INC 1 Tochigi, Japan
Kabushiki Kaisha Toshiba 1 Tokyo, Japan

Recent patent applications by Sobukawa Hiroshi

Hiroshi Sobukawa from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-06-08

US20230173636A1

Performing operations; transporting

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

#2 | 2020-12-17

US20200391341A1

Performing operations; transporting

Method for polishing substrate including functional chip

#3 | 2020-04-30

US20200130131A1

Performing operations; transporting

Polishing apparatus of substrate

#4 | 2016-05-12

US20160131141A1

Mechanical engineering

Magnetic levitated pump

#5 | 2014-04-03

US20140091215A1

Electricity

Electro-optical inspection apparatus and method with dust or particle collection function

#6 | 2013-10-03

US20130259712A1

Mechanical engineering

VACUUM EVACUATION APPARATUS

#7 | 2012-03-29

US20120074316A1

Electricity

Electro-optical inspection apparatus and method with dust or particle collection function

#8 | 2011-11-03

US20110266468A1

Electricity

Extreme ultraviolet light source apparatus

#9 | 2010-05-06

US20100108918A1

Electricity

Extreme ultraviolet light source apparatus

#10 | 2009-10-01

US20090246038A1

Mechanical engineering

Turbo vacuum pump

#11 | 2009-09-03

US20090218506A1

Electricity

Electron beam apparatus

#12 | 2005-07-07

US20050145171A1

Chemistry; metallurgy

Processing method utilizing an apparatus to be sealed against workpiece

#13 | 2005-03-22

US10034373

Processing apparatus to be sealed against workpiece

InventorID:

466654 ⎘