Tokyo
Japan
4
2012-10-02
The entities that hold a legal rights for patent applications filed by inventor Murata Hitoshi:
Hitoshi Murata from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
CVD apparatus and method of cleaning the CVD apparatus
#2 | 2006-09-21Device for cleaning CVD device and method of cleaning CVD device
#3 | 2006-09-14Cvd apparatus and method for cleaning cvd apparatus
#4 | 2005-11-17Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas
4697539 ⎘