Wilton, Connecticut
United States
7
2005-11-15
The entities that hold a legal rights for patent applications filed by inventor Galburt Daniel:
Daniel Galburt from Wilton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
System to increase throughput in a dual substrate stage double exposure lithography system
#2 | 2005-11-10Method to increase throughput in a dual substrate stage double exposure lithography system
#3 | 2005-07-28System to increase throughput in a dual substrate stage double exposure lithography system
#4 | 2005-04-14Method and system for improved trajectory planning and execution
#5 | 2005-04-05Method to increase throughput in a dual substrate stage double exposure lithography system
#6 | 2005-02-08Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination
#7 | 2005-01-18Method, system, and computer program product for improved trajectory planning and execution
4822425 ⎘