Moscow
Russian Federation
4
2005-12-01
The entities that hold a legal rights for patent applications filed by inventor Egorov Eugeni E.:
Eugeni E. Egorov from Moscow, RU has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
#2 | 2005-08-23Mask correction for photolithographic processes
#3 | 2005-06-23Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
#4 | 2005-06-23Gradient method of mask edge correction
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