Austin, Texas
United States
3
2024-04-11
The entities that hold a legal rights for patent applications filed by inventor Panneerchelvam Premkumar:
Premkumar Panneerchelvam from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR ACCELERATED ETCH PROCESS DEVELOPMENT
#2 | 2023-04-13Systems and methods for setting up a physics-based model
#3 | 2021-02-25System and method to adjust a kinetics model of surface reactions during plasma processing
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