Shanghai
China
28
2017-11-30
26
2020-05-19
These are the the leading inventors for applications assigned to SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.:
SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. based in Shanghai, CN has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Wafer processing device and method therefor
#2 | 2017-08-03 ✅ Patent 10,197,923 granted on 2019-02-05Exposure device and out-of-focus and tilt error compensation method
#3 | 2017-01-19 ✅ Patent 9,760,022 granted on 2017-09-12Lithography machine workpiece table and vertical position initialization method thereof
#4 | 2016-05-26 ✅ Patent 9,760,025 granted on 2017-09-12Reticle shape regulation device and method, and exposure apparatus using same
#5 | 2015-12-24 ✅ Patent 9,752,643 granted on 2017-09-05Negative stiffness system for gravity compensation of micropositioner
#6 | 2015-12-10WARPED SILICON-CHIP ADSORPTION DEVICE AND ADSORPTION METHOD THEREOF
#7 | 2015-11-26 ✅ Patent 9,893,596 granted on 2018-02-13Magnetic alignment system and alignment method therefor
#8 | 2015-10-08 ✅ Patent 9,588,444 granted on 2017-03-07Balance mass system shared by workpiece table and mask table, and lithography machine
#9 | 2015-09-17 ✅ Patent 9,448,488 granted on 2016-09-20Off-axis alignment system and alignment method
#10 | 2015-09-03 ✅ Patent 9,933,703 granted on 2018-04-03Photolithographic illuminator device enabling controlled diffraction
#11 | 2015-08-20 ✅ Patent 9,874,818 granted on 2018-01-23Photolithographic illuminator that is telecentric in two directions
#12 | 2015-04-09 ✅ Patent 9,310,782 granted on 2016-04-12Method for measuring displacement of planar motor rotor
#13 | 2015-02-05 ✅ Patent 9,455,164 granted on 2016-09-27Laser annealing apparatus and laser annealing method
#14 | 2015-01-08 ✅ Patent 9,766,054 granted on 2017-09-19Planar motor rotor displacement measuring device and its measuring method
#15 | 2014-06-26 ✅ Patent 9,195,146 granted on 2015-11-24Interference exposure device and method
#16 | 2014-06-12 ✅ Patent 9,036,154 granted on 2015-05-19Four-axis four-subdividing interferometer
#17 | 2014-05-08 ✅ Patent 9,036,155 granted on 2015-05-19Six-axis four-subdividing interferometer
#18 | 2014-03-13 ✅ Patent 9,519,231 granted on 2016-12-13Method for measuring and calibrating centroid of coarse stage of photolithography tool
#19 | 2014-01-16 ✅ Patent 8,920,031 granted on 2014-12-30Split type aerostatic bearing
#20 | 2013-12-19 ✅ Patent 9,256,138 granted on 2016-02-09Method for measuring distortion of projection objective
#21 | 2013-11-07LARGE FIELD PROJECTION OBJECTIVE FOR LITHOGRAPHY
#22 | 2013-10-17 ✅ Patent 9,188,434 granted on 2015-11-17Backside alignment apparatus and method
#23 | 2013-09-26 ✅ Patent 8,970,964 granted on 2015-03-03Projection objective lens system
#24 | 2010-07-15 ✅ Patent 8,035,801 granted on 2011-10-11Method for in-situ aberration measurement of optical imaging system in lithographic tools
#25 | 2010-02-25 ✅ Patent 8,134,689 granted on 2012-03-13Dual stage positioning and switching system
#26 | 2009-11-05 ✅ Patent 8,130,365 granted on 2012-03-06Immersion flow field maintenance system for an immersion lithography machine
#27 | 2009-09-03 ✅ Patent 8,027,028 granted on 2011-09-27Precise positioning system for dual stage switching exposure
#28 | 2009-07-23 ✅ Patent 7,746,571 granted on 2010-06-29Large-field unit-magnification projection optical system
Also check out Shanghai Micro Electronics Equipment Co., Ltd.'s (Shanghai, China) applicant profile with 21 patent applications submitted.
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