Nirasaki
Japan
8
2012-02-09
The entities that hold a legal rights for patent applications filed by inventor Hirose Jun:
Jun Hirose from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Fluid control apparatus
#2 | 2011-09-08Plasma processing method and apparatus
#3 | 2011-01-06Plasma processing apparatus, focus ring, and susceptor
#4 | 2007-07-26Focus ring and plasma processing apparatus
#5 | 2006-05-11Relative pressure control system and relative flow control system
#6 | 2005-12-08Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
#7 | 2005-11-24Plasma processing apparatus and method
#8 | 2005-02-01Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
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