Dresden
Germany
7
2014-07-03
The entities that hold a legal rights for patent applications filed by inventor Hirschfeld Botho:
Botho Hirschfeld from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Systems and methods for providing wafer access in a wafer processing system
#2 | 2014-07-03Systems and methods for handling substrates at below dew point temperatures
#3 | 2014-05-29Modular prober and method for operating same
#4 | 2013-01-31Method and device for contacting a row of contact areas with probe tips
#5 | 2012-06-14Method for measurement of a power device
#6 | 2011-09-22Probe station for on-wafer-measurement under EMI-shielding
#7 | 2007-06-21Device for testing thin elements
62294 ⎘