Eindhoven
Netherlands
25
2021-03-04
The entities that hold a legal rights for patent applications filed by inventor BOOM Herman:
Herman BOOM from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method involving a heater
#2 | 2019-10-24LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#3 | 2019-08-01Lithographic apparatus and device manufacturing method involving a heater
#4 | 2018-07-19Lithographic apparatus and device manufacturing method
#5 | 2016-02-18Lithographic apparatus and device manufacturing method involving a heater
#6 | 2016-01-07Lithographic apparatus and device manufacturing method
#7 | 2014-08-21Lithographic apparatus and device manufacturing method
#8 | 2014-04-10Lithographic apparatus and device manufacturing method
#9 | 2012-05-10Lithographic apparatus and device manufacturing method involving a heater
#10 | 2011-11-10Lithographic apparatus and device manufacturing method
#11 | 2011-08-11Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
#12 | 2010-12-23Lithographic apparatus and device manufacturing method
#13 | 2010-12-23Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
#14 | 2010-09-30Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder
#15 | 2009-08-20Lithographic apparatus and device manufacturing method
#16 | 2009-06-18Lithographic apparatus and device manufacturing method
#17 | 2008-06-12Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
#18 | 2008-01-03Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
#19 | 2007-03-29Lithographic apparatus and device manufacturing method
#20 | 2006-05-25Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle
#21 | 2006-03-30Lithographic apparatus and device manufacturing method
#22 | 2006-02-16Lithographic apparatus and device manufacturing method having liquid evaporation control
#23 | 2005-12-22Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
#24 | 2005-08-11Lithographic apparatus and device manufacturing method
#25 | 2005-06-30Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
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