Eric James Shero

SYSTEMS AND METHODS FOR MONITORING PROCESSING APPARATUS

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSITION ASSEMBLY

FORMATION OF GATE STACKS COMPRISING A THRESHOLD VOLTAGE TUNING LAYER

REACTOR MANIFOLDS

METHOD, SYSTEM AND APPARATUS FOR FORMING AN OXIDE LAYER

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND METHOD OF USING SAME

METHODS AND APPARATUS FOR CLEANING A VESSEL

SHOWERHEAD ASSEMBLY AND COMPONENTS

MULTIPLE TEMPERATURE REACTOR SYSTEM AND METHOD

SEMICONDUCTOR PROCESSING DEVICE

METHODS FOR FORMING A DOPED HIGH-K LAYER ON A SUBSTRATE

METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE, METHOD FOR DEPOSITING A DIPOLE LAYER ON A SUBSTRATE, AND ASSOCIATED METHODS FOR FORMING A GATE STRUCTURE FOR A SEMICONDUCTOR DEVICE

MANIFOLDS FOR UNIFORM VAPOR DEPOSITION

METHODS AND SYSTEMS FOR FILLING A GAP

VAPOR DEPOSITION OF FILMS COMPRISING MOLYBDENUM

APPARATUS AND METHOD FOR PROVIDING A PULSE OF A PRECURSOR

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS OF USING SAME

METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTING LAYER

PROCESS GAS RECYCLING

HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME

POLYMERIC INHIBITOR FOR AREA SELECTIVE DEPOSITION

SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND DEPOSITION ASSEMBLIES

METAL AND CARBON CONTAINING LAYERS, INCLUDING METHODS AND SYSTEMS FOR THEIR MANUFACTURE

SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASSEMBLIES

Method of forming vanadium nitride layer and structure including the vanadium nitride layer

METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS

METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL

REMOTE SOLID REFILL CHAMBER

METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING THE CHROMIUM NITRIDE LAYER

BOTTOM-UP METAL NITRIDE FORMATION

SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING

METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD VOLTAGE TUNING LAYER

LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION

REMOTE SOLID REFILL CHAMBER

SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHODS OF USING SAME

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

SEMICONDUCTOR PROCESSING DEVICE

METHODS AND APPARATUS FOR SOLID SOURCE REFILL

METHODS AND APPARATUS FOR CLEANING A VESSEL

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSITION ASSEMBLY

METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K DIELECTRIC LAYERS AND RELATED DEVICE STRUCTURES

SEMICONDUCTOR MANUFACTURING MONITORING PROCESS

METHOD FOR TREATMENT OF DEPOSITION REACTOR

SOLID SOURCE SUBLIMATOR

Structure including SiOCN layer and method of forming same

LOW TEMPERATURE FLOWABLE VANADIUM OXIDE GAP FILL

SOLID SOURCE SUBLIMATOR

SYSTEMS AND METHODS FOR DEPOSITION OF MOLYBDENUM FOR SOURCE/DRAIN CONTACTS

HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM

Method for treatment of deposition reactor

SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING

Formation of gate stacks comprising a threshold voltage tuning layer

Solid source sublimator

METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE

METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE

MULTIPLE-LAYER METHOD AND SYSTEM FOR FORMING MATERIAL WITHIN A GAP

METHOD OF FORMING STRUCTURES INCLUDING A VANADIUM OR INDIUM LAYER

REACTOR MANIFOLDS

PRECURSOR DELIVERY SYSTEM AND METHOD THEREFOR

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND METHOD OF USING SAME

SUBSTRATE SUSCEPTOR USING EDGE PURGING

Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer

MANIFOLDS FOR UNIFORM VAPOR DEPOSITION

METHODS AND SYSTEMS FOR FILLING A GAP

METHODS AND SYSTEMS FOR FILLING A GAP

METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING ALUMINUM, TITANIUM, AND CARBON

METHOD FOR TREATMENT OF DEPOSITION REACTOR

Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus

Structures including metal carbide material, devices including the structures, and methods of forming same

Method of depositing vanadium metal

Bottom-up metal nitride formation

VAPOR DEPOSITION OF FILMS COMPRISING MOLYBDENUM

VAPOR DEPOSITION OF TUNGSTEN FILMS

SYSTEM AND METHODS FOR DIRECT LIQUID INJECTION OF VANADIUM PRECURSORS

METHODS AND SYSTEMS FOR DELIVERY OF VANADIUM COMPOUNDS

Solid source precursor vessel

Method of forming chromium nitride layer and structure including the chromium nitride layer

Deposition of hafnium oxide within a high aspect ratio hole

Method of forming structures including a vanadium or indium layer

SHOWERHEAD ASSEMBLY AND COMPONENTS

Method of forming vanadium nitride layer and structure including the vanadium nitride layer

Semiconductor deposition reactor manifolds

Semiconductor processing device

Heating zone separation for reactant evaporation system

FILL VESSELS AND CONNECTORS FOR CHEMICAL SUBLIMATORS

Heater assembly including cooling apparatus and method of using same

Substrate susceptor using edge purging

Reactant vaporizer and related systems and methods

Reactor manifolds

Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer

Structure including SiOC layer and method of forming same

Structure including SiOCN layer and method of forming same

Semiconductor processing reactor and components thereof

Solid source sublimator

Structures including metal carbide material, devices including the structures, and methods of forming same

Multi-zone reactor, system including the reactor, and method of using the same

Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus

Methods for forming a silicon nitride film on a substrate and related semiconductor device structures

Reactant vaporizer and related systems and methods