Eindhoven
Netherlands
42
2025-05-01
The entities that hold a legal rights for patent applications filed by inventor Laurent Thibault Simon Mathieu:
Thibault Simon Mathieu Laurent from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
LITHOGRAPHIC APPARATUS AND METHOD
#2 | 2023-09-07SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#3 | 2023-08-31Lithographic apparatus and method
#4 | 2023-02-23Method of unloading an object from a support table
#5 | 2022-06-30Lithographic apparatus and method
#6 | 2022-02-24Method of unloading an object from a support table
#7 | 2021-05-06Method of unloading an object from a support table
#8 | 2020-11-26Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#9 | 2020-09-10Extraction body for lithographic apparatus
#10 | 2020-05-07Lithographic apparatus and method
#11 | 2020-04-23Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
#12 | 2019-09-26Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#13 | 2019-06-06Lithographic apparatus and method
#14 | 2019-05-30Extraction body for lithographic apparatus
#15 | 2019-02-07Lithographic apparatus and device manufacturing method
#16 | 2018-11-29Measurement substrate and a measurement method
#17 | 2018-10-04Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
#18 | 2018-09-20Object holder and lithographic apparatus
#19 | 2018-08-23Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#20 | 2018-03-15Lithographic apparatus and method
#21 | 2017-12-21Sensor, lithographic apparatus and device manufacturing method
#22 | 2017-12-07Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#23 | 2017-11-02Object holder and lithographic apparatus
#24 | 2017-09-14Lithographic apparatus and device manufacturing method
#25 | 2017-07-27Lithographic apparatus and an object positioning system
#26 | 2017-07-27Lithographic apparatus and a device manufacturing method
#27 | 2017-06-22Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#28 | 2017-03-09Lithographic apparatus
#29 | 2016-07-14Lithographic apparatus and method
#30 | 2015-10-01Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#31 | 2015-06-18Lithographic apparatus
#32 | 2015-05-14Object holder and lithographic apparatus
#33 | 2015-03-19Sensor, lithographic apparatus and device manufacturing method
#34 | 2013-04-18Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
#35 | 2013-02-28Fluid handling structure, a lithographic apparatus and a device manufacturing method
#36 | 2013-02-21Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
#37 | 2013-02-14Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method
#38 | 2012-12-06Temperature sensing probe, burl plate, lithographic apparatus and method
#39 | 2012-01-19Lithographic apparatus and method
#40 | 2011-09-15Lithographic apparatus and method
#41 | 2011-09-15Lithographic apparatus and method
#42 | 2011-07-28Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
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