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Inventor profile of:

Erik Roelof Loopstra

City:

Eindhoven

Country:

Netherlands

Published Applications:

128

Last publication date:

2020-09-10

Top Assignees for applications by Erik Roelof Loopstra

The entities that hold a legal rights for patent applications filed by inventor Loopstra Erik Roelof:

ASML Netherlands B.V. 126 Veldhoven, Netherlands
ASML Holding N.V. 6 Veldhoven, Netherlands
Carl Zeiss SMT GmbH 6 Oberkochen, Germany
CARL ZEISS SMT AG 5 Oberkochen, Germany
ASML NETHERLAND B.V. 3 Veldhoven, Netherlands
ASML Netherlands B.V. 1 Veldoven, Netherlands
ASML Netherelands B.V. 1 Veldhoven, Netherlands
ASML Netherlands B.V. 1 Veldhoven, NL-5504 DR, Netherlands
ASML Holding N.V. 1 NL-5504 DR Veldhoven, Netherlands
ASML Netherlands B.V. 1 NL-5504 DR Veldhoven, Netherlands
ASMLNETHERLANDS B.V. 1 Veldhoven, Netherlands

Recent patent applications by Loopstra Erik Roelof

Erik Roelof Loopstra from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2020-09-10

US20200285155A1

Physics

Projection system and mirror and radiation source for a lithographic apparatus

#2 | 2020-07-02

US20200209757A1

Physics

Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing Method

#3 | 2020-03-26

US20200096882A1

Physics

Pellicle attachment apparatus

#4 | 2020-02-20

US20200057394A1

Physics

Mask assembly

#5 | 2020-01-09

US20200012204A1

Physics

Pellicle attachment apparatus

#6 | 2019-10-24

US20190324374A1

Physics

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

#7 | 2019-10-03

US20190302625A1

Physics

Lithographic method

#8 | 2019-07-11

US20190212661A1

Physics

Lithographic apparatus and device manufacturing method

#9 | 2019-06-06

US20190171109A1

Physics

Projection system and mirror and radiation source for a lithographic apparatus

#10 | 2019-03-21

US20190086819A1

Physics

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

#11 | 2019-01-24

US20190025717A1

Physics

Pellicle attachment apparatus

#12 | 2018-11-15

US20180329314A1

Physics

Mask assembly

#13 | 2018-09-13

US20180259846A1

Physics

Graphene spectral purity filter

#14 | 2018-07-19

US20180203364A1

Physics

Lithographic apparatus and device manufacturing method

#15 | 2018-03-22

US20180081278A1

Physics

Lithographic method

#16 | 2018-02-01

US20180031982A1

Physics

Radiation system

#17 | 2017-11-30

US20170343904A1

Physics

Lithographic apparatus and device manufacturing method

#18 | 2017-08-17

US20170237225A1

Electricity

Radiation source

#19 | 2017-08-17

US20170235236A1

Physics

Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets

#20 | 2017-06-29

US20170184975A1

Physics

Undulator

#21 | 2017-06-08

US20170160650A1

Physics

Lithographic apparatus and device manufacturing method

#22 | 2017-06-08

US20170160646A1

Physics

Lithographic apparatus, spectral purity filter and device manufacturing method

#23 | 2017-01-19

US20170017150A1

Physics

Pellicle for reticle and multilayer mirror

#24 | 2016-09-29

US20160282727A1

Physics

Lithographic apparatus and device manufacturing method

#25 | 2016-05-26

US20160147161A1

Physics

Lithographic method

#26 | 2016-01-28

US20160026091A1

Physics

Radiation collector, radiation source and lithographic apparatus

#27 | 2016-01-07

US20160004171A1

Physics

Lithographic apparatus and device manufacturing method

#28 | 2016-01-07

US20160004170A1

Physics

Lithographic apparatus and device manufacturing method

#29 | 2015-12-10

US20150355557A1

Physics

Gas flow optimization in reticle stage environment

#30 | 2015-11-12

US20150323872A1

Physics

Projection system and minor and radiation source for a lithographic apparatus

#31 | 2015-10-15

US20150296602A1

Electricity

Method and apparatus for generating radiation

#32 | 2015-10-01

US20150277241A1

Physics

Patterning device manipulating system and lithographic apparatuses

#33 | 2015-09-17

US20150261102A1

Physics

Lithographic apparatus and device manufacturing method

#34 | 2015-09-10

US20150253679A1

Physics

Lithographic method and apparatus

#35 | 2015-08-27

US20150241795A1

Physics

Method for calibration of an encoder scale and a lithographic apparatus

#36 | 2015-08-13

US20150227036A1

Physics

Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program

#37 | 2015-07-30

US20150212428A1

Physics

Lithographic apparatus, device manufacturing method and displacement measurement system

#38 | 2015-06-04

US20150153661A1

Physics

Substrate table system, lithographic apparatus and substrate table swapping method

#39 | 2015-05-14

US20150131067A1

Physics

Lithographic apparatus and device manufacturing method

#40 | 2015-03-19

US20150077729A1

Electricity

Module and method for producing extreme ultraviolet radiation

#41 | 2015-01-15

US20150015858A1

Physics

Lithographic apparatus and device manufacturing method

#42 | 2014-11-27

US20140347642A1

Physics

Lithographic apparatus and device manufacturing method

#43 | 2014-11-27

US20140347641A1

Physics

Device, lithographic apparatus, method for guiding radiation and device manufacturing method

#44 | 2014-09-25

US20140285785A1

Physics

Lithographic apparatus, device manufacturing method and computer program

#45 | 2014-08-21

US20140233004A1

Physics

Lithographic apparatus and device manufacturing method

#46 | 2014-08-14

US20140224173A1

Performing operations; transporting

Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets

#47 | 2014-08-07

US20140218706A1

Physics

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

#48 | 2014-07-31

US20140211184A1

Physics

Radiation source

#49 | 2014-07-24

US20140203193A1

Electricity

Radiation source

#50 | 2014-07-10

US20140192337A1

Physics

LITHOGRAPHIC APPARATUS, METHOD OF SETTING UP A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

#51 | 2014-06-12

US20140160455A1

Physics

Pellicle for reticle and multilayer mirror

#52 | 2014-06-12

US20140160453A1

Electricity

Radiation source

#53 | 2014-06-12

US20140160450A1

Electricity

Radiation source and method for lithographic apparatus and device manufacturing method

#54 | 2014-04-10

US20140098357A1

Physics

Lithographic apparatus and device manufacturing method

#55 | 2014-03-27

US20140085619A1

Physics

Lithographic apparatus, spectral purity filter and device manufacturing method

#56 | 2014-03-13

US20140071420A1

Physics

Lithographic apparatus and device manufacturing method

#57 | 2014-01-02

US20140002805A1

Electricity

Electrostatic Clamp Apparatus And Lithographic Apparatus

#58 | 2013-12-12

US20130327955A1

Electricity

Radiation source, lithographic apparatus and device manufacturing method

#59 | 2013-08-01

US20130194586A1

Physics

System for detecting motion, lithographic apparatus and device manufacturing method

#60 | 2013-06-06

US20130141709A1

Physics

Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method

#61 | 2013-04-11

US20130088699A1

Physics

Lithographic apparatus and method

#62 | 2013-04-11

US20130088697A1

Physics

Collector mirror assembly and method for producing extreme ultraviolet radiation

#63 | 2013-03-21

US20130070218A1

Physics

SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS, METHOD FOR REMOVING CONTAMINANT PARTICLES AND METHOD FOR MANUFACTURING A DEVICE

#64 | 2013-02-14

US20130038926A1

Physics

Spectral purity filter

#65 | 2012-12-27

US20120327381A1

Electricity

Radiation Source, Lithographic Apparatus and Device Manufacturing Method

#66 | 2012-11-22

US20120295205A1

Physics

Radiation source, lithographic apparatus and device manufacturing method

#67 | 2012-11-08

US20120281193A1

Physics

Lithographic apparatus and method

#68 | 2012-11-08

US20120280149A1

Electricity

EUV radiation source comprising a droplet accelerator and lithographic apparatus

#69 | 2012-11-08

US20120280148A1

Electricity

EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

#70 | 2012-10-18

US20120262690A1

Physics

ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND ILLUMINATION METHOD

#71 | 2012-07-19

US20120182536A1

Physics

Source collector, lithographic apparatus and device manufacturing method

#72 | 2012-06-21

US20120154774A1

Physics

Lithographic apparatus and device manufacturing method

#73 | 2012-06-14

US20120147349A1

Physics

EUV radiation system and lithographic apparatus

#74 | 2012-05-17

US20120120377A1

Physics

Lithographic apparatus and device manufacturing method

#75 | 2012-04-12

US20120086926A1

Physics

Lithographic apparatus and device manufacturing method

#76 | 2012-03-29

US20120075613A1

Physics

Lithographic apparatus having an encoder type position sensor system

#77 | 2012-02-02

US20120026480A1

Electricity

Image-Compensating Addressable Electrostatic Chuck System

#78 | 2012-01-19

US20120013882A1

Physics

Illumination system, lithographic apparatus and method of forming an illumination mode

#79 | 2011-11-10

US20110273677A1

Physics

Lithographic apparatus and device manufacturing method

#80 | 2011-10-13

US20110249245A1

Physics

Method of cooling an optical element, lithographic apparatus and method for manufacturing a device

#81 | 2011-09-15

US20110223543A1

Physics

Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter

#82 | 2011-09-15

US20110222040A1

Physics

Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

#83 | 2011-08-04

US20110188014A1

Physics

Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing method

#84 | 2011-07-21

US20110176121A1

Physics

Lithographic apparatus, device manufacturing method and computer readable medium

#85 | 2011-07-14

US20110170079A1

Physics

Radiation system and lithographic apparatus

#86 | 2011-07-14

US20110170078A1

Physics

Projection system and lithographic apparatus

#87 | 2011-07-07

US20110164236A1

Physics

Radiation source and lithographic apparatus

#88 | 2011-06-16

US20110143288A1

Physics

Radiation source, lithographic apparatus and device manufacturing method

#89 | 2011-05-19

US20110116066A1

Physics

Lithographic apparatus and device manufacturing method

#90 | 2011-04-28

US20110096311A1

Physics

Lithographic apparatus and patterning device

#91 | 2011-03-31

US20110075154A1

Physics

Lithographic apparatus and method for calibrating the same

#92 | 2011-02-03

US20110027721A1

Physics

Lithographic apparatus and device manufacturing method

#93 | 2011-02-03

US20110026002A1

Physics

EUV radiation generation apparatus

#94 | 2011-01-20

US20110013166A1

Electricity

Radiation system and lithographic apparatus

#95 | 2011-01-20

US20110013157A1

Physics

Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method

#96 | 2010-09-16

US20100231890A1

Physics

Device manufacturing method, lithographic apparatus and a computer program

#97 | 2010-09-16

US20100231130A1

Electricity

Radiation source, lithographic apparatus, and device manufacturing method

#98 | 2010-09-02

US20100220335A1

Physics

Lithographic apparatus and method for calibrating the same

#99 | 2010-08-05

US20100195071A1

Physics

Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor

#100 | 2010-07-22

US20100182579A1

Physics

Laser device

InventorID:

87182 ⎘