Eschweiler
Germany
13
2017-11-02
The entities that hold a legal rights for patent applications filed by inventor Franken Walter:
Walter Franken from Eschweiler, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
CVD or PVD reactor for coating large-area substrates
#2 | 2016-03-17Transport module for a semiconductor fabrication device or coupling device
#3 | 2013-02-14COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A SHIELDING PLATE
#4 | 2011-07-21Shadow mask held magnetically on a substrate support
#5 | 2010-07-08Device for the temperature control of the surface temperatures of substrates in a CVD reactor
#6 | 2009-07-23SOURCE CONTAINER OF A VPE REACTOR
#7 | 2009-04-30Apparatus and Method for Controlling the Surface Temperature of a Substrate in a Process Chamber
#8 | 2008-10-16Cvd-Reactor with Slidingly Mounted Susceptor Holder
#9 | 2007-04-05CVD reactor with stabilized process chamber height
#10 | 2006-06-15Mask-retaining device
#11 | 2006-06-06Reaction chamber with at least one HF feedthrough
#12 | 2005-05-05Device for depositing thin layers with a wireless detection of process parameters
#13 | 2005-01-06Process and device for depositing in particular crystalline layers on in particular crystalline substrates
89573 ⎘