Oxford, Connecticut
United States
5
2015-10-22
The entities that hold a legal rights for patent applications filed by inventor EBERT, JR. Earl William:
Earl William EBERT, JR. from Oxford, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
#2 | 2015-08-27Reticle cooling system in a lithographic apparatus
#3 | 2015-07-09Heating and Cooling Systems in a Lithographic Apparatus
#4 | 2014-09-11TUNABLE WAVELENGTH ILLUMINATION SYSTEM
#5 | 2011-04-14Tunable wavelength illumination system
902045 ⎘