Daegu-si
South Korea
24
2024-04-18
16
2026-02-03
These are the the leading inventors for applications assigned to S&S TECH CO., LTD.:
S&S TECH CO., LTD. based in Daegu-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
#2 | 2024-04-18 ✅ Patent 12,541,144 granted on 2026-02-03PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
#3 | 2022-08-25 ✅ Patent 11,927,880 granted on 2024-03-12Phase shift blankmask and photomask for EUV lithography
#4 | 2022-07-28 ✅ Patent 11,940,725 granted on 2024-03-26Phase shift blankmask and photomask for EUV lithography
#5 | 2022-03-10BLANKMASK AND PHOTOMASK
#6 | 2022-03-03 ✅ Patent 11,435,661 granted on 2022-09-06Reflective type blankmask for EUV, and method for manufacturing the same
#7 | 2022-03-03BLANKMASK WITH BACKSIDE CONDUCTIVE LAYER, AND PHOTOMASK MANUFACTURED WITH THE SAME
#8 | 2022-02-10PELLICLE FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING THE SAME
#9 | 2021-07-08 ✅ Patent 11,579,521 granted on 2023-02-14Reflective type blankmask and photomask for EUV
#10 | 2021-05-06 ✅ Patent 11,467,485 granted on 2022-10-11Blankmask and photomask for extreme ultraviolet lithography
#11 | 2021-04-29 ✅ Patent 11,360,377 granted on 2022-06-14Half-tone attenuated phase shift blankmask and photomask for EUV lithography
#12 | 2021-04-01PELLICLE FOR EUV LITHOGRAPHY AND METHOD FOR MANUFACTURING THE SAME
#13 | 2020-12-03BLANKMASK AND PHOTOMASK
#14 | 2020-01-16 ✅ Patent 10,942,445 granted on 2021-03-09Blankmask and photomask, and methods of fabricating the same
#15 | 2019-05-16 ✅ Patent 10,859,901 granted on 2020-12-08Pellicle for EUV lithography and method of fabricating the same
#16 | 2018-11-22PHASE-SHIFT BLANKMASK AND PHASE-SHIFT PHOTOMASK
#17 | 2018-11-22PHASE-SHIFT BLANKMASK AND METHOD OF FABRICATING THE SAME
#18 | 2018-09-13 ✅ Patent 10,768,523 granted on 2020-09-08Pellicle for EUV lithography and method of fabricating the same
#19 | 2017-01-26 ✅ Patent 10,036,947 granted on 2018-07-31Blankmask and photomask using the same
#20 | 2016-02-25 ✅ Patent 9,851,632 granted on 2017-12-26Phase-shift blankmask and photomask
#21 | 2015-07-30 ✅ Patent 9,389,500 granted on 2016-07-12Mask blank, photomask, and method for manufacturing same
#22 | 2014-01-02 ✅ Patent 9,229,317 granted on 2016-01-05Blankmask and method for fabricating photomask using the same
#23 | 2013-10-31 ✅ Patent 9,256,119 granted on 2016-02-09Phase-shift blankmask and method for fabricating the same
#24 | 2013-04-18 ✅ Patent 8,846,276 granted on 2014-09-30Blankmask and photomask using the same
Also check out S&S TECH Co., Ltd.'s (Daegu-si, South Korea) applicant profile with 18 patent applications submitted.
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