Tokyo
Japan
120
2017-08-10
120
2017-10-24
These are the the leading inventors for applications assigned to Advantest Corp.:
Advantest Corp. based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Exposure apparatus
#2 | 2016-05-12 ✅ Patent 9,607,807 granted on 2017-03-28Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same
#3 | 2015-08-27 ✅ Patent 9,213,240 granted on 2015-12-15Electron beam exposure method
#4 | 2015-08-27 ✅ Patent 9,824,860 granted on 2017-11-21Charged particle beam exposure apparatus and method of manufacturing semiconductor device
#5 | 2015-07-16 ✅ Patent 9,478,396 granted on 2016-10-25Charged particle beam exposure apparatus
#6 | 2014-06-19 ✅ Patent 8,957,389 granted on 2015-02-17Electromagnetic lens for electron beam exposure apparatus
#7 | 2014-05-01 ✅ Patent 9,116,434 granted on 2015-08-25Electron beam exposure method
#8 | 2014-03-06 ✅ Patent 8,779,378 granted on 2014-07-15Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detector
#9 | 2014-02-20 ✅ Patent 8,859,993 granted on 2014-10-14Sample holder of electron beam exposure apparatus and electron beam exposure method using the same
#10 | 2013-10-17 ✅ Patent 8,618,970 granted on 2013-12-31DA conversion device and electron beam exposure system using the same
#11 | 2013-09-12 ✅ Patent 8,809,778 granted on 2014-08-19Pattern inspection apparatus and method
#12 | 2013-05-09 ✅ Patent 9,070,607 granted on 2015-06-30Method of manufacturing semiconductor device
#13 | 2013-05-02 ✅ Patent 8,507,858 granted on 2013-08-13Pattern measurement apparatus and pattern measurement method
#14 | 2013-03-21 ✅ Patent 8,698,081 granted on 2014-04-15Pattern inspection apparatus and pattern inspection method
#15 | 2012-10-11 ✅ Patent 8,487,281 granted on 2013-07-16Electron beam exposure apparatus and electron beam exposure method
#16 | 2012-08-30 ✅ Patent 8,604,431 granted on 2013-12-10Pattern-height measuring apparatus and pattern-height measuring method
#17 | 2012-05-17 ✅ Patent 8,382,911 granted on 2013-02-26Stage device and stage cleaning method
#18 | 2012-05-10 ✅ Patent 8,779,359 granted on 2014-07-15Defect review apparatus and defect review method
#19 | 2012-02-09 ✅ Patent 8,258,471 granted on 2012-09-04Pattern measuring apparatus and pattern measuring method
#20 | 2011-10-13 ✅ Patent 8,559,697 granted on 2013-10-15Mask inspection apparatus and image generation method
#21 | 2011-10-13 ✅ Patent 8,675,948 granted on 2014-03-18Mask inspection apparatus and mask inspection method
#22 | 2011-09-29 ✅ Patent 8,330,104 granted on 2012-12-11Pattern measurement apparatus and pattern measurement method
#23 | 2011-09-22 ✅ Patent 8,466,439 granted on 2013-06-18Electron beam lithography apparatus and electron beam lithography method
#24 | 2011-08-25 ✅ Patent 8,605,985 granted on 2013-12-10Pattern measurement apparatus and pattern measurement method
#25 | 2011-08-25 ✅ Patent 8,530,857 granted on 2013-09-10Stage device
#26 | 2011-06-23 ✅ Patent 8,390,201 granted on 2013-03-05Multi-column electron beam exposure apparatus and magnetic field generation device
#27 | 2011-06-16 ✅ Patent 8,354,638 granted on 2013-01-15Electron detection device and scanning electron microscope
#28 | 2011-05-26 ✅ Patent 8,338,758 granted on 2012-12-25Heater power control circuit and burn-in apparatus using the same
#29 | 2011-03-10 ✅ Patent 8,384,052 granted on 2013-02-26Electron beam lithography apparatus and electron beam lithography method
#30 | 2011-03-03 ✅ Patent 8,431,895 granted on 2013-04-30Pattern measuring apparatus and pattern measuring method
#31 | 2010-12-16 ✅ Patent 8,223,045 granted on 2012-07-17D/A converter and electron beam exposure apparatus
#32 | 2010-09-23 ✅ Patent 8,281,794 granted on 2012-10-09Stage device and stage cleaning method
#33 | 2010-08-05 ✅ Patent 8,071,943 granted on 2011-12-06Mask inspection apparatus and image creation method
#34 | 2010-05-06 ✅ Patent 7,990,177 granted on 2011-08-02Driver circuit for producing signal simulating transmission loss
#35 | 2010-04-29 ✅ Patent 8,507,857 granted on 2013-08-13Charged particle beam inspection apparatus and inspection method using charged particle beam
#36 | 2010-03-11 ✅ Patent 8,115,520 granted on 2012-02-14Driver circuit
#37 | 2010-03-11 ✅ Patent 7,940,072 granted on 2011-05-10Timing generator and semiconductor test apparatus
#38 | 2010-01-28 ✅ Patent 7,960,996 granted on 2011-06-14Variable delay circuit, timing generator and semiconductor testing apparatus
#39 | 2010-01-28 ✅ Patent 8,330,344 granted on 2012-12-11Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same
#40 | 2010-01-28 ✅ Patent 8,222,619 granted on 2012-07-17Multi-column electron beam exposure apparatus and multi-column electron beam exposure method
#41 | 2009-12-17 ✅ Patent 8,196,067 granted on 2012-06-05Mask for multi-column electron beam exposure, and electron beam exposure apparatus and exposure method using the same
#42 | 2009-10-01 ✅ Patent 8,530,836 granted on 2013-09-10Electron-beam dimension measuring apparatus and electron-beam dimension measuring method
#43 | 2009-09-17 ✅ Patent 7,944,263 granted on 2011-05-17Timing generator and semiconductor test apparatus
#44 | 2009-08-18 ✅ Patent 7,577,416 granted on 2009-08-18Single balanced mixer
#45 | 2009-06-25 ✅ Patent 7,699,538 granted on 2010-04-20Hermetically sealing member having optical transmission means, optoelectronic apparatus, and optical transmission method
#46 | 2009-06-25 ✅ Patent 7,791,360 granted on 2010-09-07Connection unit, a board for mounting a device under test, a probe card and a device interfacing part
#47 | 2009-02-26 ✅ Patent 7,760,344 granted on 2010-07-20Optical sampling apparatus
#48 | 2009-02-17 ✅ Patent 7,492,198 granted on 2009-02-17Phase-locked loop circuit, delay locked loop circuit, timing generator, semiconductor test instrument, and semiconductor integrated circuit
#49 | 2009-01-15 ✅ Patent 7,576,345 granted on 2009-08-18Semiconductor relay
#50 | 2008-12-18 ✅ Patent 7,839,158 granted on 2010-11-23Method of detecting abnormality in burn-in apparatus
#51 | 2008-12-04 ✅ Patent 7,768,332 granted on 2010-08-03Waveform generation apparatus, setup cycle correction method and semiconductor test apparatus
#52 | 2008-11-13 ✅ Patent 7,777,202 granted on 2010-08-17Electron beam exposure apparatus involving the position and velocity calculation
#53 | 2008-09-18 ✅ Patent 7,791,022 granted on 2010-09-07Scanning electron microscope with length measurement function and dimension length measurement method
#54 | 2008-08-07 ✅ Patent 7,518,405 granted on 2009-04-14Impedance matching circuit, input-output circuit and semiconductor test apparatus
#55 | 2008-07-17 ✅ Patent 7,737,421 granted on 2010-06-15Electron beam exposure apparatus and method for cleaning the same
#56 | 2008-06-19 ✅ Patent 7,535,273 granted on 2009-05-19Phase-locked loop circuit, delay locked loop circuit, timing generator, semiconductor test instrument, and semiconductor integrated circuit
#57 | 2008-05-22 ✅ Patent 7,558,692 granted on 2009-07-07Consumption current balance circuit, compensation current amount adjusting method, timing generator, and semiconductor testing apparatus
#58 | 2008-03-20 ✅ Patent 8,014,584 granted on 2011-09-06Pattern dimension measuring apparatus and pattern area measuring method
#59 | 2008-03-20 ✅ Patent 7,560,693 granted on 2009-07-14Electron-beam size measuring apparatus and size measuring method with electron beams
#60 | 2008-01-17 ✅ Patent 7,590,506 granted on 2009-09-15Pattern measurement apparatus and pattern measuring method
#61 | 2007-12-27 ✅ Patent 7,423,390 granted on 2008-09-09Electron beam generator for multiple columns
#62 | 2007-12-13 ✅ Patent 7,663,103 granted on 2010-02-16Line-width measurement adjusting method and scanning electron microscope
#63 | 2007-11-22 ✅ Patent 7,634,370 granted on 2009-12-15Waveform input circuit, waveform observation unit and semiconductor test apparatus
#64 | 2007-10-02 ✅ Patent 7,276,920 granted on 2007-10-02Packaging and interconnection of contact structure
#65 | 2007-09-04 ✅ Patent 7,265,369 granted on 2007-09-04Method and system for detecting chemical substance
#66 | 2007-08-28 ✅ Patent 7,263,150 granted on 2007-08-28Probability estimating apparatus and method for peak-to-peak clock skews
#67 | 2007-07-03 ✅ Patent 7,240,256 granted on 2007-07-03Semiconductor memory test apparatus and method for address generation for defect analysis
#68 | 2007-06-28 ✅ Patent 7,330,045 granted on 2008-02-12Semiconductor test apparatus
#69 | 2007-06-07 ✅ Patent 7,541,798 granted on 2009-06-02Semiconductor test apparatus and performance board
#70 | 2007-03-20 ✅ Patent 7,194,668 granted on 2007-03-20Event based test method for debugging timing related failures in integrated circuits
#71 | 2007-03-06 ✅ Patent 7,187,324 granted on 2007-03-06Radiowave monitoring method and apparatus
#72 | 2007-02-13 ✅ Patent 7,178,115 granted on 2007-02-13Manufacturing method and apparatus to avoid prototype-hold in ASIC/SOC manufacturing
#73 | 2007-02-06 ✅ Patent 7,173,443 granted on 2007-02-06Semiconductor test system
#74 | 2007-02-01 ✅ Patent 7,332,926 granted on 2008-02-19Semiconductor test apparatus
#75 | 2007-02-01 ✅ Patent 7,518,379 granted on 2009-04-14Connection unit, a board for mounting a device under test, a probe card and a device interfacing part
#76 | 2007-01-30 ✅ Patent 7,171,602 granted on 2007-01-30Event processing apparatus and method for high speed event based test system
#77 | 2006-12-21 ✅ Patent 7,375,356 granted on 2008-05-20Electron-beam exposure system
#78 | 2006-11-30 ✅ Patent 7,738,797 granted on 2010-06-15Optical module socket
#79 | 2006-09-28 ✅ Patent 7,378,926 granted on 2008-05-27Single crystalline magnetic garnet and YIG device
#80 | 2006-09-28 ✅ Patent 7,317,336 granted on 2008-01-08Impedance matching circuit, input-output circuit and semiconductor test apparatus
#81 | 2006-09-28 ✅ Patent 7,442,947 granted on 2008-10-28Electron-beam exposure system and electron-beam exposure method
#82 | 2006-08-29 ✅ Patent 7,098,680 granted on 2006-08-29Connection unit, a board for mounting a device under test, a probe card and a device interfacing part
#83 | 2006-08-08 ✅ Patent 7,089,135 granted on 2006-08-08Event based IC test system
#84 | 2006-08-08 ✅ Patent 7,089,517 granted on 2006-08-08Method for design validation of complex IC
#85 | 2006-07-13 ✅ Patent 7,196,534 granted on 2007-03-27Semiconductor test instrument
#86 | 2006-06-01 ✅ Patent 7,847,272 granted on 2010-12-07Electron beam exposure mask, electron beam exposure method, and electron beam exposure system
#87 | 2006-05-23 ✅ Patent 7,049,608 granted on 2006-05-23Position detection apparatus, position detection method, electronic part carrying apparatus, and electronic beam exposure apparatus
#88 | 2006-05-09 ✅ Patent 7,041,512 granted on 2006-05-09Electron beam exposure apparatus, electron beam exposing method, semiconductor element manufacturing method, and pattern error detection method
#89 | 2006-05-09 ✅ Patent 7,041,988 granted on 2006-05-09Electron beam exposure apparatus and electron beam processing apparatus
#90 | 2006-04-13 ✅ Patent 7,394,068 granted on 2008-07-01Mask inspection apparatus, mask inspection method, and electron beam exposure system
#91 | 2006-04-11 ✅ Patent 7,027,217 granted on 2006-04-11Optical pulse generator and optical pulse testing instrument and method
#92 | 2006-04-11 ✅ Patent 7,028,236 granted on 2006-04-11Semiconductor memory testing device
#93 | 2006-03-30 ✅ Patent 7,216,281 granted on 2007-05-08Format control circuit and semiconductor test device
#94 | 2006-03-16 ✅ Patent 7,294,998 granted on 2007-11-13Timing generation circuit and semiconductor test device having the timing generation circuit
#95 | 2006-03-07 ✅ Patent 7,010,452 granted on 2006-03-07Event pipeline and summing method and apparatus for event based test system
#96 | 2006-02-23 ✅ Patent 7,138,819 granted on 2006-11-21Differential voltage measuring apparatus and semiconductor testing apparatus
#97 | 2006-01-26 ✅ Patent 7,444,576 granted on 2008-10-28Target value search circuit, taget value search method, and semiconductor test device using the same
#98 | 2005-12-22 ✅ Patent 7,095,267 granted on 2006-08-22MOSFET drive circuit, programmable power supply and semiconductor test apparatus
#99 | 2005-12-20 ✅ Patent 6,978,410 granted on 2005-12-20Test language conversion method
#100 | 2005-12-08 ✅ Patent 7,240,269 granted on 2007-07-03Timing generator and semiconductor testing device
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