45870 ⎘
Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type; Cylindrical coordinate type comprising an articulated arm
Articulated arm apparatus
#302Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method
#303Robot having two arms with unequal link lengths
#304Horizontal multi-joint robot and robot
#305Equipment platform system and wafer transfer method thereof
#306Horizontal articulated robot and method for manufacturing horizontal articulated robot
#307Industrial robot with elevating mechanism and arm-elevating mechanism
#308Substrate processing apparatus
#309Robot having end effector and method of operating the same
#310Production system general-purpose cell
#311MULTI-COMPONENT ROBOTIC HUB MOUNTING PLATE TO FACILITATE HUB REMOVAL
#312Patient positioner system
#313Robot arm with high capacity adjustable joint
#314Robot for a substrate processing system
#315Dual scara arm
#316Link structure
#317Robot having arm with unequal link lengths and non-circular pulley
#318Robot having arm with unequal link lengths
#319Articulated robot, and conveying device
#320Robot
#321Two-link arm trajectory
#322Industrial robot
#323Horizontal multiple articulation type robot
#324Robot having interchangeability features
#325Dual arm robot
#326Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing
#327SEALED ROBOT BASE SYSTEM
#328Control system for and method of controlling product delivery systems
#329Substrate transport apparatus
#330Scara robot
#331Substrate processing apparatus
#332Substrate transport vacuum platform
#333Substrate processing apparatus
#334Substrate transfer robot, substrate transfer system, and method for transferring substrate
#335Substrate transfer robot, substrate transfer system, and method for detecting arrangement state of substrate
#336Rotating mechanism, industrial robot and method for returning rotating body to original position
#337Production system general-purpose cell
#338Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing
#339Systems, apparatus and methods for transporting substrates in electronic device manufacturing
#340Robot having arm with unequal link lengths
#341Apparatus for driving scara robot
#342Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
#343Dual arm vacuum robot
#344Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
#345Robot having high stiffness coupling
#346Substrate transport apparatus
#347Crane and automated storage and retrieval system
#348Horizontal multi-joint robot and robot
#349Dual scara arm
#350Rotating range restriction mechanism for rotating body, and industrial robot
#351Semiconductor manufacturing systems
#352Collaborative robotic equipment
#353Transfer robot
#354Conveying robot
#355Conveying system
#356Transfer robot
#357Ceiling-mounted scara robot
#358Robot system
#359Robot arm having lower arm link separable into two parts
#360Transfer robot and substrate processing apparatus
#361Robotically operated vehicle charging station
#362Gear unit and robot
#363Elastic rotary actuator
#364Low variability robot
#365Articulated arm robot, control method and control program
#366ROBOT
#367Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
#368Industrial robot with protruding second drive motor
#369MANIPULATOR, LOADER, AND POSITIONING STRUCTURE FOR PRODUCTION LINE
#370Belt-driven robot having extended Z-axis motion
#371TRANSFER ROBOT
#372Production system general-purpose cell
#373Substrate processing apparatus
#374Horizontal articulated robot, and method of controlling the same
#375Horizontal articulated robot
#376Industrial robot
#377Linear semiconductor processing facilities
#378Dual arm robot
#379Coaxial drive vacuum robot
#380Horizontal multiple articulation type robot
#381LOW PROFILE DUAL ARM VACUUM ROBOT
#382Dual arm robot
#383Stacked process modules for a semiconductor handling system
#384Substrate support apparatus and vacuum processing apparatus
#385Control system for and method of controlling product delivery systems
#386Horizontal articulated robot and substrate transfer system provided with the same
#387Substrate transport apparatus with multiple independently movable articulated arms
#388Method of processing fish and a fish processing plant
#389Robotic Arm for Controlling the Movement of Human Arm
#390HORIZONTAL MULTI-JOINT ROBOT AND TRANSPORTATION APPARATUS INCLUDING THE SAME
#391VACUUM TRANSFER APPARATUS
#392Transfer robot
#393Arm mechanism, and vacuum robot provided with the same
#394Robotic arm for transporting substrate in ultrahigh vacuum
#395Vacuum processing apparatus and substrate transfer method
#396Robot and conveying system
#397Robot having end effector and method of operating the same
#398Industrial robot
#399Parallel link mechanism and industrial robot
#400Transfer robot, transfer method, and control method
#401Robot systems, apparatus and methods for transporting substrates
#402Systems, apparatus and methods for transporting substrates
#403SUBSTRATE TRANSFER ROBOT AND VACUUM PROCESSING APPARATUS
#404Workpiece transfer system
#405ROBOTIC RADIAL TOOL POSITIONING SYSTEM
#406Robot arm with temperature compensation
#407TRANSFER DEVICE AND VACUUM PROCESSING APPARATUS USING THE SAME
#408Industrial robot and method of transporting the same
#409Articulated structure for a multi-axis robot, and a robot including such a structure
#410Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method
#411Transport apparatus
#412Parts handling device, system and method
#413Robotic system including foldable robotic arm
#414Power transmission switching device and recording apparatus
#415System and Method for Determining and Managing Risk Associated with a Business Relationship Between an Organization and a Third Party Supplier
#416Robotic arm driving mechanism
#417TRANSFERRING APPARATUS AND LARGE TRANSFERRING APPARATUS
#418Articulated robot
#419Industrial robot
#420Patient positioner system
#421Stacked process modules for a semiconductor handling system
#422Horizontal multiple articulation type robot
#423Articulated robot
#424Robotic arm for a radiation treatment system
#425Wafer transfer robot
#426Industrial robot
#427Robot with linearly movable support member attaching to gripper
#428Robotic manipulator using rotary drives
#429Transfer apparatus
#430Substrate transport apparatus with multiple independently movable articulated arms
#431Production system general-purpose cell
#432Passive-active end-effector and pneumatic manipulator equipped therewith
#433ROBOT SYSTEM
#434Robot with belt-drive system
#435Jig for fastening bolt
#436Linear semiconductor processing facilities
#437Direct drive robotic manipulator
#438Belt-driven robot having extended Z-axis motion
#439Semiconductor material handling system
#440ROBOTIC COMPONENTS FOR SEMICONDUCTOR MANUFACTURING
#441Part-handling device and industrial handler comprising said device
#442SCARA-type robotic system
#443Industrial robot
#444Parallel link mechanism and industrial robot
#445Unequal link SCARA arm
#446Substrate transport apparatus
#447Linear semiconductor processing facilities
#448Transportation apparatus and drive mechanism
#449Formed article taking-out apparatus and forming machine
#450Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine
#451Horizontal articulated robot
#452Dual scara arm
#453Extracting device of molded article
#454Extracting device of molded article
#455Methods and systems for driving robotic components of a semiconductor handling system
#456Robot arm mechanism
#457Multi-joint robot and control device thereof
#458Molded product removing device
#459Horizontal multiple articulation type robot
#460Methods and systems for handling a workpiece in vacuum-based material handling system
#461Stacked process modules for a semiconductor handling system
#462Motor, robot, substrate loader, and exposure apparatus
#463Software controller for handling system
#464Sensor methods and systems for semiconductor handling
#465Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
#466Wafer transfer apparatus
#467Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system
#468Linear moving mechanism and transfer robot using the same
#469Transfer robot and inspection method for thin substrate
#470Articulated robot
#471Interacting with and inspecting of movable inventory systems
#472Determining vehicle integrity based on observed behavior during predetermined manipulations
#473Robot
#474Wafer handling robots with rotational joint encoders
#475Robots linkable to perform tasks in coordinated teams