Patents-Review.com
ClassID:

83817 ⎘

B81B2201/014 - CPC Classification

Classification description:

Specific applications of microelectromechanical systems; Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples

Recent Application in this class:
#1
20260015222
2026-01-15

Two stage plating for reduced Ni and NiO layer formation

 #2
20250301616
2025-09-25

STATIC RANDOM ACCESS MEMORY USING MICRO-ELECTROMECHANICAL SYSTEMS

 #3
20240270566
2024-08-15

ELECTRONIC DEVICE AND METHOD OF FABRICATING THE SAME

 #4
20240150166
2024-05-09

Encapsulated MEMS Switching Element, Device and Production Method

 #5
20230066345
2023-03-02

METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR DEVICE

 #6
20200216311
2020-07-09

Three dimensional microstructures and fabrication process

 #7
20200102213
2020-04-02

MEMS bridge devices and methods of manufacture thereof

 #8
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #9
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #10
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #11
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #12
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #13
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #14
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #15
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #16
20190144266
2019-05-16

Discharge circuits, devices and methods

 #17
20190077655
2019-03-14

MEMS switch and electronic device

 #18
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #19
20180309216
2018-10-25

Micro-electro-mechanical systems (MEMS) terminal structure of board-to-board electrical connector and manufacturing method thereof

 #20
20180304206
2018-10-25

Methods for creating fluidic cavities by transmembrane etching through porous membranes and structures made thereby and uses of such structures

 #21
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #22
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #23
20180197828
2018-07-12

Vanishing via for hardware IP protection from reverse engineering

 #24
20180155184
2018-06-07

BONDLINE FOR MM-WAVE APPLICATIONS

 #25
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #26
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #27
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #28
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #29
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #30
20180012972
2018-01-11

NEMS devices with series ferroelectric negative capacitor

 #31
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #32
20180009657
2018-01-11

Use of a reactive, or reducing gas as a method to increase contact lifetime in micro contact MEMS switch devices

 #33
20180002162
2018-01-04

MEMS sensor with high voltage switch

 #34
20170283249
2017-10-05

PIEZOELECTRIC PACKAGE-INTEGRATED SWITCHING DEVICES

 #35
20170225942
2017-08-10

Active opening MEMS switch device

 #36
20170210620
2017-07-27

Use of a reactive, or reducing gas as a method to increase contact lifetime in micro contact mems switch devices

 #37
20170174505
2017-06-22

Infrared sensor design using an epoxy film as an infrared absorption layer

 #38
20170158490
2017-06-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #39
20170148592
2017-05-25

Very low power microelectromechanical devices for the internet of everything

 #40
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #41
20170066645
2017-03-09

Refractory seed metal for electroplated MEMS structures

 #42
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #43
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #44
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #45
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #46
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #47
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #48
20160225569
2016-08-04

Normally closed microelectromechanical switches (MEMS), methods of manufacture and design structures

 #49
20160207761
2016-07-21

NEMS devices with series ferroelectric negative capacitor

 #50
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #51
20160096721
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #52
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #53
20160065058
2016-03-03

Two-state charge-pump control-loop for MEMS DVC control

 #54
20160060107
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #55
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #56
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #57
20160027601
2016-01-28

Encapsulated micro-electromechanical system switch and method of manufacturing the same

 #58
20160009548
2016-01-14

MICROELECTROMECHANICAL SYSTEMS HAVING CONTAMINANT CONTROL FEATURES

 #59
20150353348
2015-12-10

Glass wafer assembly

 #60
20150287556
2015-10-08

Micro normally-closed structure and method for manufacturing the same

 #61
20150235779
2015-08-20

MEMS device with constant capacitance

 #62
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #63
20150035387
2015-02-05

MEMS switch device and method of fabrication

 #64
20140203424
2014-07-24

Electronic device and manufacturing method thereof

 #65
20140184028
2014-07-03

Hybrid radio frequency component

 #66
20140166463
2014-06-19

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #67
20140115873
2014-05-01

Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing

 #68
20140070340
2014-03-13

Normally closed microelectromechanical switches (MEMS), methods of manufacture and design structures

 #69
20140017844
2014-01-16

Integrated circuit switches, design structure and methods of fabricating the same

 #70
20130284572
2013-10-31

Through-silicon via resonators in chip packages and methods of assembling same

 #71
20130234265
2013-09-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #72
20130221454
2013-08-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #73
20130156993
2013-06-20

Micro-electro-mechanical system (MEMS) structures and design structures

 #74
20130154033
2013-06-20

Micro-electro-mechanical system (MEMS) structures and design structures

 #75
20130153378
2013-06-20

Horizontal coplanar switches and methods of manufacture

 #76
20130032570
2013-02-07

Method of manufacturing a switch system

 #77
20130032454
2013-02-07

Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing

 #78
20130032453
2013-02-07

Elimination of silicon residues from MEMS cavity floor

 #79
20130027146
2013-01-31

MEMS vibrator and oscillator

 #80
20120318648
2012-12-20

Method of forming micro-electrical-mechanical structure (MEMS)

 #81
20120223400
2012-09-06

Infrared sensor design using an epoxy film as an infrared absorption layer

 #82
20120175715
2012-07-12

Encapsulated micro-electromechanical system switch and method of manufacturing the same

 #83
20120175230
2012-07-12

Actuation signal for microactuator bounce and ring suppression

 #84
20120156820
2012-06-21

Composite sacrificial structure for reliably creating a contact gap in a MEMS switch

 #85
20120138436
2012-06-07

MEMS switches and fabrication methods

 #86
20120074527
2012-03-29

Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element

 #87
20120043188
2012-02-23

MEMS devices

 #88
20120025331
2012-02-02

Horizontal coplanar switches and methods of manufacture

 #89
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #90
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #91
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #92
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #93
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #94
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #95
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #96
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #97
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #98
20110220471
2011-09-15

Micromechanical component and method for manufacturing a micromechanical component

 #99
20110209970
2011-09-01

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

 #100
20110176252
2011-07-21

MEMS sprung cantilever tunable capacitors and methods

 #101
20110156537
2011-06-30

Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch

 #102
20110063068
2011-03-17

THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH

 #103
20110049649
2011-03-03

Integrated circuit switches, design structure and methods of fabricating the same

 #104
20110006874
2011-01-13

MICROMECHANICAL ACTUATOR

 #105
20100314669
2010-12-16

Capacitive MEMS switch and method of fabricating the same

 #106
20100294633
2010-11-25

Electronic device and method of manufacturing the same

 #107
20100187076
2010-07-29

Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing

 #108
20100182120
2010-07-22

MEMS device with bi-directional element

 #109
20100181631
2010-07-22

Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme

 #110
20100155202
2010-06-24

Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing

 #111
20100032268
2010-02-11

Stacked MEMS device

 #112
20100019872
2010-01-28

Wide band and radio frequency waveguide and hybrid integration in a silicon package

 #113
20090233058
2009-09-17

Carbon nanotube structure and method for producing the same

 #114
20090174014
2009-07-09

Micromechanical actuators comprising semiconductors on a group III nitride basis

 #115
20090127082
2009-05-21

Microfabricated cantilever slider with asymmetric spring constant

 #116
20090084593
2009-04-02

High-frequency circuit components

 #117
20090045039
2009-02-19

Switch array

 #118
20090040008
2009-02-12

Thermal actuator for a MEMS-based relay switch

 #119
20090033454
2009-02-05

MEMS actuators with even stress distribution

 #120
20090002118
2009-01-01

MEMS device with bi-directional element

 #121
20080268575
2008-10-30

Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS

 #122
20080238257
2008-10-02

MEMS device with low operation voltage, large contact pressure force, and large separation force, and portable communication terminal with the MEMS device

 #123
20080217149
2008-09-11

INTEGRATED ARRANGEMENT AND METHOD FOR PRODUCTION

 #124
20080157339
2008-07-03

Stacked MEMS device

 #125
20080135386
2008-06-12

Micro-electro mechanical tunneling switch

 #126
20080079120
2008-04-03

Interconnect structure using through wafer vias and method of fabrication

 #127
20080001691
2008-01-03

MEMS switch and method of fabricating the same

 #128
20070230241
2007-10-04

Nanomechanical switching device

 #129
20070207584
2007-09-06

Method and apparatus for curing epoxy-based photoresist using a continuously varying temperature profile

 #130
20070158775
2007-07-12

Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

 #131
20070146095
2007-06-28

Micro-electromechanical system (MEMS) switch

 #132
20070141743
2007-06-21

Three dimensional microstructures and methods for making three dimensional microstructures

 #133
20070109081
2007-05-17

RF MEMS switch and fabrication method thereof

 #134
20070094864
2007-05-03

Fabrication method of an RF MEMS switch

 #135
20060292729
2006-12-28

Semiconductor device and manufacturing method thereof

 #136
20060290443
2006-12-28

Ultra-low voltage capable zipper switch

 #137
20060285255
2006-12-21

Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch

 #138
20060220223
2006-10-05

Reactive nano-layer material for MEMS packaging

 #139
20060006514
2006-01-12

Interconnecting integrated circuits using MEMS

 #140
20050156694
2005-07-21

RF MEMS switch and fabrication method thereof

 #141
20050104085
2005-05-19

Nanoelectromechanical transistors and switch systems

 #142
20050012577
2005-01-20

Micro-electro-mechanical switch, and methods of making and using it

 #143
15656756
2020-05-05

Configurable micro-electro-mechanical systems (MEMS) transfer switch and methods

 #144
15485182
2018-04-24

Method for making vias using a doped substrate