83819 ⎘
Specific applications of microelectromechanical systems; Switches characterised by the shape Switches not provided for in -
ELECTROMECHANICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME
#2Reliable and Robust Zero Power Micro-Mechanical Switch
#3CIRCUIT BREAKER CIRCUIT WITH MICRO-ELECTROMECHANICAL SYSTEMS SWITCH AND ISOLATION CIRCUIT
#4MEMS SWITCH AND ELECTRONIC DEVICE
#5MEMS SWITCH, DRIVING METHOD THEREOF, AND ELECTRONIC DEVICE
#6MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
#7STRAIN SENSOR SWITCH FOR TIMING BASED SENSING
#8MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
#9Radio frequency micro-electro-mechanical switch and radio frequency device
#10MEMS switch and manufacture method
#11Distributed MEMS Switch Array Design with Multiple Input/Output Ports
#12Microelectromechanical systems (MEMS) switch and related methods
#13Waterproof MEMS button device, package housing the button device, and method of manufacturing the button device
#14Thermal metamaterial for low power MEMS thermal control
#15MEMS element and electrical circuit
#16Multiaxial strain engineering of defect doped materials
#17Full Symmetric Multi-Throw Switch Using Conformal Pinched Through Via
#18Computation devices and artificial neurons based on nanoelectromechanical systems
#19Zero power plasmonic microelectromechanical device
#20Full symmetric multi-throw switch using conformal pinched through via
#21MEMS bridge devices and methods of manufacture thereof
#22Electrically controllable integrated switch
#23Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a project
#24MEMS heater or emitter structure for fast heating and cooling cycles
#25Semiconductor structures provided within a cavity and related design structures
#26Electromechanical relay device
#27Zero power plasmonic microelectromechanical device
#28Semiconductor structures provided within a cavity and related design structures
#29Vanishing via for hardware IP protection from reverse engineering
#30COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECHANICAL SYSTEMS
#31Computation devices and artificial neurons based on nanoelectromechanical systems
#32Contact material for MEMS devices
#33Contact point structure, electronic device, and electronic apparatus
#34Electrostatic actuator and switch
#35Capacitive RF MEMS intended for high-power applications
#36MEMS heater or emitter structure for fast heating and cooling cycles
#37Electromechanical power switch integrated circuits and devices and methods thereof
#38Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device
#39MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE
#40MEMS STRUCTURE WITH MULTILAYER MEMBRANE
#41Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a projection
#42Electrically controllable integrated switch
#43Semiconductor structures provided within a cavity and related design structures
#44Electrostatically driven MEMS device
#45Computation devices and artificial neurons based on nanoelectromechanical systems
#46Merged legs and semi-flexible anchoring having cantilevers for MEMS device
#47Electric equipment having movable portion, and its manufacture
#48Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#49Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#50Liquid MEMS component responsive to pressure
#51Semiconductor device and method for manufacturing the same
#52Semiconductor structures provided within a cavity and related design structures
#53Methods for forming a sealed liquid metal drop
#54Micromechanical device and methods to fabricate same using hard mask resistant to structure release etch
#55Apparatus for reconfiguring an integrated waveguide
#56Structure for signal line, manufacturing method for signal line and switch using the signal line
#57Elimination of silicon residues from MEMS cavity floor
#58Nonvolatile nano-electromechanical system device
#59METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES
#60MEMS and method of manufacturing the same
#61MEMS device with integral packaging
#62Method for fabricating a fixed structure defining a volume receiving a movable element in particular of a MEMS
#63MEMS structure with a flexible membrane and improved electric actuation means
#64Method for manufacturing micromachine
#65Dual substrate MEMS plate switch and method of manufacture
#66Electrostatic actuator including a plurality of urging units with varying rigities
#67Configurable power supply using MEMS switch
#68Nonvolatile nano-electromechanical system device
#69CARBON NANOTUBE ASSEMBLY
#70Multi-stable micro electromechanical switches and methods of fabricating same
#71Micromachine switch, filter circuit, duplexer circuit, and communication device
#72Hysteretic MEMS thermal device and method of manufacture
#73Microelectromechanical element and electromechanical switch using the same
#74Contact device and method for producing the same
#75Micromachine and method for manufacturing the same
#76Carbon nanotube MEMS assembly
#77Movable device
#78Micromechanical component, method for fabrication and use
#79Dual substrate MEMS plate switch and method of manufacture
#80MEMS device with integral packaging
#81RF MEMS switch with a flexible and free switch membrane
#82Micro-actuator and locking switch
#83MEMS device using an actuator
#84MEMS thermal device with slideably engaged tether and method of manufacture
#85Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch
#86Miniaturized Contact Spring
#87Switch
#88Nanowire electromechanical device and method of fabricating the same
#89MEMS RF switch module including a vertical via
#90Multi-stable micro electromechanical switches and methods of fabricating same
#91Tunable resonator with MEMS element
#92Electroplating pcb components
#93Switch structures or the like based on a thermoresponsive polymer
#94Method of manufacturing electrical parts
#95Microelectromechanical systems (MEMS) devices integrated in a hermetically sealed package
#96Method for producing micromechanical and micro-optic components consisting of glass-type materials
#97MEMS device with integral packaging
#98Membrane switch components and designs
#99Anchorless electrostatically activated micro electromechanical system switch
#100Method for registering a deposited material with channel plate channels
#101Multi-metal layer MEMS structure and process for making the same