MICRO MIRRORS HAVING IMPROVED HINGES

TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED

Electronic part with affixed MEMS

Method of producing an oscillator device

Microelectromechanical device with thermal expansion balancing layer or stiffening layer

Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same

Method of manufacturing MEMS devices providing air gap control

METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME

METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME

Methods for measurement and characterization of interferometric modulators

Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display

THREE-DIMENSIONAL MODULE

Oscillating device, light deflector, and image forming apparatus using the same

Reducing adherence in a MEMS device

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

Micromirror manufacturing method

MEMS devices requiring no mechanical support

Microactuator, optical device and exposure apparatus, and device manufacturing method

Method of manufacturing monocrystalline silicon micromirrors

Integration manufacturing process for MEMS device

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

MEMS DEVICES WITH PROTECTIVE COATINGS

Magnetic element and manufacturing method therefor

Tapered reinforcing struts for micromachined structures

System and method for micro-electromechanical operation of an interferometric modulator

Micro-oscillation element provided with weight portion, and array utilizing the same

Flat substrate having an electrically conductive structure

Shock resistant and mode mixing resistant torsional hinged device

Package structure and electronic device using the same

MEMS Passivation with Phosphonate Surfactants

System and method for direct bonding of substrates

MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same

DEFORMABLE MIRROR

Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel

Micro-electro-mechanical system micro mirror

Miniature RF and microwave components and methods for fabricating such components

Low-cost continuous phase sheet deformable mirror

Method for aligning die to substrate

Micro-electro-mechanical systems device

Vertical Comb Drive and Uses Thereof

Apparatus, method and system for providing enhanced mechanical protection of thin beams

MEMS device and fabrication method of the same

Actuator, optical scanner and image forming device

Semiconductor device and method of forming thereof

Micromechanical actuator having multiple joints

NON-CONTACT MICRO MIRRORS

SIMPLIFIED MANUFACTURING PROCESS FOR MICRO MIRRORS

Electrochemically Fabricated Hermetically Sealed Microstructures and Methods of and Apparatus for Producing Such Structures

Methods of and Apparatus for Forming Three-Dimensional Structures Integral with Semiconductor Based Circuitry

Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates

Flip-chip assembly of protected micromechanical devices

Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use

Measurement apparatus and measurement method

Device comprising an ohmic via contact, and method of fabricating thereof

Monolithic structures including alignment and/or retention fixtures for accepting components

Method for fabricating a structure for a microelectromechanical systems (MEMS) device

Microelectromechanical device with optical function separated from mechanical and electrical function

Method of manufacturing MEMS devices providing air gap control

PROCESS CONTROL MONITORS FOR INTERFEROMETRIC MODULATORS

Process control monitors for interferometric modulators

MEMS device

Oscillator device, optical deflector and optical instrument using the same

METHOD OF FORMING DECOUPLED COMB ELECTRODES BY SELF-ALIGNMENT ETCHING

Hinge assembly for a digital micromirror device

Reflective spatial light modulator with high stiffness torsion spring hinge

Tiltable-body apparatus, and method of fabricating the same

Staggered vertical comb drive fabrication method

Methods for producing MEMS with protective coatings using multi-component sacrificial layers

Method of and Apparatus for Forming Three-Dimensional Structures Integral With Semiconductor Based Circuitry

Semiconductor device and method of fabrication

Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns

Method of manufacturing a mirror and a mirror device

Micromirror and micromirror device

Magnetically actuated microelectromechanical systems actuator

Micromirror and micromirror device

Micro actuator having tilt and vertical displacement and device having such micro actuator

Out-of-plane electrostatic actuator

Semiconductor device having a suspended micro-system

Oscillating system and optical deflector

Method for fabricating a micro structure

Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action

Fast-response micro-mechanical devices

Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant

Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant

Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems

Anti-stiction gas-phase lubricant for micromechanical systems

Method and apparatus for forming a DMD window frame with molded glass

Micromirror unit and method of making the same

Actuator

Manufacturing methods for MEMS element and optical modulator

Manufacturing a mirror plate or other operational structure having superior flatness by laser milling for use with torsional hinged devices

Micro-mirror device and array thereof

Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids

Electrochemically fabricated hermetically sealed microstructures and methods of and apparatus for producing such structures

Mesoscale and microscale device fabrication methods using split structures and alignment elements

Three-dimensional metal microfabrication process and devices produced thereby

Semiconductor device

System and method for direct-bonding of substrates

Micro-mirror device package and method for fabricating the same

Support structure for MEMS device and methods therefor

Support structure for MEMS device and methods therefor

Electrically controlled tiltable microstructures

Micromechanical optical element having a reflective surface as well as its use

Torsional hinged MEMS device

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Device and method for stacked multi-level uncoupled electrostatic actuators

Actuator having fixed and movable comb electrodes

Co-planar surface and torsion device mirror structure and method of manufacture for optical displays

Microelectromechanical structure and a method for making the same

Utilizing a protective plug to maintain the integrity of the FTP shrink hinge

Electromechanical drives adapted to provide three degrees of mobility

TMOS-infrared uncooled sensor and focal plane array

Actuator with Alternating Steady Voltage Combs and Variable Voltage Combs

Antireflective coating for semiconductor devices and method for the same

Tiltable-body apparatus, and method of fabricating the same

Method for releasing a micromechanical structure

High reflector tunable stress coating, such as for a MEMS mirror

High reflector tunable stress coating, such as for a MEMS mirror

Process control monitors for interferometric modulators

Method of producing a device with a movable portion

Method for attaching chips in a flip-chip arrangement

Single torsional hinge mirror

Ultra-flat reflective MEMS optical elements

Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device

Method of fabricating a free-standing microstructure

Method of monitoring the manufacture of interferometric modulators

Device having patterned spacers for backplates and method of making the same

Magnetically actuated microelectromechanical systems actuator

Systems and methods for amorphous flexures in micro-electro mechanical systems

MEMS using filler material and method

Method of selective etching using etch stop layer

Process control monitors for interferometric modulators

Process control monitors for interferometric modulators

Process control monitors for interferometric modulators

Monolithic MEMS device having a balanced cantilever plate

Method for fabricating microstructure and microstructure

Scanning device and fabrication method thereof

System and method for micro-electromechanical operation of an interferometric modulator

Micromechanical actuator with multiple-plane comb electrodes and methods of making

Electrode configuration for piano MEMs micromirror

Surface lubrication in microstructures

Integration manufacturing process for MEMS device

Method for manufacturing micro-structural unit

Systems and methods for overcoming stiction

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Systems and methods for three-dimensional lithography and nano-indentation

Optical semiconductor device

Microactuator having increased rigidity with reduced mass

Microdevice with movable microplatform and process for making thereof

Single piece torsional hinged device with central spines and perimeter ridges to reduce flexing

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Microelectromechanical devices with lubricants and getters formed thereon

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

Electrochemical fabrication process including process monitoring, making corrective action decisions, and taking appropriate actions

Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit

Micro mirror device with adjacently suspended spring and method for the same

Micromechanical actuator with multiple-plane comb electrodes and methods of making

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Multilayered oscillating device with spine support

Large cavity wafer-level package for MEMS

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Interlaced array of piano MEMs micromirrors

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

MEMS device and method of forming MEMS device

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Method for making a micromechanical device by using a sacrificial substrate

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Electrode design and positioning for controlled movement of a moveable electrode and associated support structure

Vertically integrated MEMS structure with electronics in a hermetically sealed cavity

Micromirror with rib reinforcement

Micromirror unit and method of making the same

Hinge structure of micromirror device

Torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing

Pre-oxidization of deformable elements of microstructures

Multilayer torsional hinged mirror with a recessed drive/sensing permanent magnet

MEMS passivation with phosphonate surfactants

Method for fabricating a structure for a microelectromechanical system (MEMS) device

Methods for depositing, releasing and packaging microelectromechanical devices on wafer substrates

Micro-oscillating element provided with torsion bar

Deflectable microstructure and method of manufacturing the same through bonding of wafers

Surface processes in fabrications of microstructures

MEMS device and method of forming MEMS device

Method and apparatus to reduce parasitic forces in electro-mechanical systems

Self-shadowing MEM structures

Two-step electrode for MEMs micromirrors

Self-shadowing MEM structures

Self-shadowing MEM structures

Manufacturing methods of MEMS device

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

MEMS device and method of forming MEMS device

Multi-step release method for electrochemically fabricated structures

Barrier layers for microelectromechanical systems

Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Tiltable-body apparatus, and method of fabricating the same

Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Method for manufacturing micro-structural unit

Process for fabricating a semiconductor device having a suspended micro-system and resultant device

Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials

Micro mirror arrays and microstructures with solderable connection sites

MEMS actuators having a physical gap filled with fluid

Actuator systems and methods

Strain-based sensing of dual-axis mirror rotation

Microelectromechanical systems (MEMS) scanners for scanning laser devices

Interference based spatial light modulator systems and methods