ClassID:

84072

B81C2201/0114 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Bulk micromachining Electrochemical etching, anodic oxidation

Recent Application in this class:
#1
20240067520
2024-02-29

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

#2
20220234885
2022-07-28

Flexible electrode and preparation method thereof

#3
20200062586
2020-02-27

Semiconductor device and method of producing a semiconductor device

#4
20190323138
2019-10-24

Feedback control of dimensions in nanopore and nanofluidic devices

#5
20190013151
2019-01-10

Ultra-high charge density electrets and method of making same

#6
20180301344
2018-10-18

Spectrally and temporally engineered processing using photoelectrochemistry

#7
20180262845
2018-09-13

MEMS microphone and method for manufacturing the same

#8
20180208459
2018-07-26

Semiconductor device and method of producing a semiconductor device

#9
20180205915
2018-07-19

Tunable MEMS etalon

#10
20180179657
2018-06-28

Method of forming local nano/micro size structures of anodized metal

#11
20170081184
2017-03-23

Anodic oxide film structure cutting method and unit anodic oxide film structure

#12
20160355943
2016-12-08

Feedback control of dimensions in nanopore and nanofluidic devices

#13
20160355942
2016-12-08

Feedback control of dimensions in nanopore and nanofluidic devices

#14
20160118265
2016-04-28

Spectrally and temporally engineered processing using photoelectrochemistry

#15
20150274516
2015-10-01

Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface

#16
20140357006
2014-12-04

Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate

#17
20130175177
2013-07-11

Method of forming a nano-structure

#18
20120103821
2012-05-03

Feedback control of dimensions in nanopore and nanofluidic devices

#19
20110253544
2011-10-20

Formation Of Nanoporous Materials

#20
20110137254
2011-06-09

Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite

#21
20100327380
2010-12-30

Method of manufacturing a capacitive electromechanical transducer

#22
20090255820
2009-10-15

Method for electrochemically structuring a conductive or semiconductor material, and device for implementing it

#23
20080044939
2008-02-21

LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON THE USE OF POROUS SEALED AIR CAVITY TECHNOLOGY OR MICROCHANNEL TECHNOLOGY

#24
20070289940
2007-12-20

Surfactant-enhanced protection of micromechanical components from galvanic degradation

#25
20050230839
2005-10-20

Fabrication of silicon micro-mechanical structures

#26
20050072926
2005-04-07

Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology

#27
20050009374
2005-01-13

Direct patterning of silicon by photoelectrochemical etching

#28
16244501
2023-01-10

Enhanced microfabrication using electrochemical techniques