84072 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Bulk micromachining Electrochemical etching, anodic oxidation
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
#2Flexible electrode and preparation method thereof
#3Semiconductor device and method of producing a semiconductor device
#4Feedback control of dimensions in nanopore and nanofluidic devices
#5Ultra-high charge density electrets and method of making same
#6Spectrally and temporally engineered processing using photoelectrochemistry
#7MEMS microphone and method for manufacturing the same
#8Semiconductor device and method of producing a semiconductor device
#9Tunable MEMS etalon
#10Method of forming local nano/micro size structures of anodized metal
#11Anodic oxide film structure cutting method and unit anodic oxide film structure
#12Feedback control of dimensions in nanopore and nanofluidic devices
#13Feedback control of dimensions in nanopore and nanofluidic devices
#14Spectrally and temporally engineered processing using photoelectrochemistry
#15Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface
#16Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate
#17Method of forming a nano-structure
#18Feedback control of dimensions in nanopore and nanofluidic devices
#19Formation Of Nanoporous Materials
#20Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
#21Method of manufacturing a capacitive electromechanical transducer
#22Method for electrochemically structuring a conductive or semiconductor material, and device for implementing it
#23LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON THE USE OF POROUS SEALED AIR CAVITY TECHNOLOGY OR MICROCHANNEL TECHNOLOGY
#24Surfactant-enhanced protection of micromechanical components from galvanic degradation
#25Fabrication of silicon micro-mechanical structures
#26Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology
#27Direct patterning of silicon by photoelectrochemical etching
#28Enhanced microfabrication using electrochemical techniques