84070 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning Bulk micromachining
Sub-classes:HIGH SPEED MANUFACTURE OF MICRO-ELECTRICAL MECHANICAL SYSTEMS ARRAYS
#2Reliable and Robust Zero Power Micro-Mechanical Switch
#3MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRENCHES
#4MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THEREOF, AND MICROFLUIDIC DEVICE
#5Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device
#6Field emission devices and methods of making thereof
#7MEMS acoustic transducer with combfingered electrodes and corresponding manufacturing process
#8Method for manufacturing MEMS torsional electrostatic actuator
#9Semiconductor devices with moving members and methods for making the same
#10Electrical tuning of resonant scanning
#11SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE
#12DEVICES WITH THINNED WAFER
#13Field emission devices and methods of making thereof
#14Semiconductor devices with moving members and methods for making the same
#15Three-axis accelerometers and fabrication methods
#16Three-axis accelerometers and fabrication methods
#17Method of creating MEMS device cavities by a non-etching process
#18Three-axis accelerometers and fabrication methods
#19Manufacturing method of suspended microstructure
#20Method of creating MEMS device cavities by a non-etching process