84074 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Bulk micromachining Thermal treatment for structural rearrangement of substrate atoms, e.g. for making buried cavities
MEMS DEVICE WITH COMPENSATION OF THE MECHANICAL STRESS AND RELATED MANUFACTURING PROCESS
#2METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS HAVING SUCH A LAYERED STRUCTURE
#3MICROMECHANICAL ARM ARRAY FOR MEMS ACTUATORS
#4METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
#5Micro-Electro-Mechanical System (Mems) Thermal Sensor
#6MEMS microphone and preparation method therefor
#7Micro-electro-mechanical system (MEMS) thermal sensor
#8ANNEALING DEVICES INCLUDING THERMAL HEATERS
#9Process for manufacturing a MEMS micromirror device, and associated device
#10Microelectromechanical electroacoustic transducer with piezoelectric actuation and corresponding manufacturing process
#11Micro-electro-mechanical system (MEMS) thermal sensor
#12Method for producing a reflection-reducing layer system
#13Micro-electro-mechanical device and manufacturing process thereof
#14Integrated micro-electromechanical device of semiconductor material having a diaphragm
#15METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
#16Method for transferring a useful layer into a supporting substrate
#17Process for fabricating a micromechanical structure made of silicon carbide including at least one cavity
#18MEMS-device manufacturing method, MEMS device, and MEMS module
#19Process for manufacturing a MEMS pressure sensor, and corresponding MEMS pressure sensor
#20Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy
#21MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN INCLINED OPTICAL WINDOW AND CORRESPONDING MICROMECHANICAL DEVICE
#22Process for manufacturing a MEMS micromirror device, and associated device
#23Silicon on nothing devices and methods of formation thereof
#24Micro-electro-mechanical device and manufacturing process thereof
#25Method for manufacturing resistive element, method for manufacturing pressure sensor element, pressure sensor element, pressure sensor, altimeter, electronic apparatus, and moving object
#26Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator
#27Silicon on nothing devices and methods of formation thereof
#28Silicon on nothing devices and methods of formation thereof
#29Semiconductor manufacturing and semiconductor device with semiconductor structure
#30Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device
#31Deposition-free sealing for micro- and nano-fabrication
#32Semiconductor manufacturing and semiconductor device with semiconductor structure
#33Process for manufacturing a micromechanical structure having a buried area provided with a filter
#34Method for forming buried cavities within a semiconductor body, and semiconductor body thus made
#35SUSPENDED MONO-CRYSTALLINE STRUCTURE AND METHOD OF FABRICATION FROM A HETEROEPITAXIAL LAYER
#36Manufacturing method of a gas sensor integrated on a semiconductor substrate
#37Micromechanical semiconductor sensor
#38Process for manufacturing a membrane of semiconductor material integrated in, and electrically insulated from, a substrate
#39Process for manufacturing deep through vias in a semiconductor device, and semiconductor device made thereby
#40Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method
#41Process for manufacturing thick suspended structures of semiconductor material
#42Method for forming buried cavities within a semiconductor body, and semiconductor body thus made
#43Method for manufacturing a micromechanical sensor element
#44Method for manufacturing a membrane sensor
#45Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device