84078 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for the planarization of structures Selective addition
Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer
#2High aspect ratio MEMS devices and methods for forming the same
#3Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#4Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates