84079 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for the planarization of structures Selective removal
MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
#2MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTECTED AGAINST HUMIDITY AND MANUFACTURING PROCESS THEREOF
#3MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
#4SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
#5MEMS Package and Method for Encapsulating an MEMS Structure
#6MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
#7MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLIQUE SURFACE AND CORRESPONDING MICROMECHANICAL DEVICE
#8Electronic device using MEMS technology
#9METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND A COMPONENT HAVING THIS MICROMECHANICAL STUCTURE
#10PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
#11Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
#12Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing (CMP) of III-V material in the presence of a CMP composition comprising a specific non-ionic surfactant
#13Method for etched cavity devices
#14System and method for filling vias
#15Method for the production of planar structures
#16Manufacturing method