84086 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material; Etching Wet etching
Anti-Stiction Process for Mems Device
#2MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE
#3SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES
#4ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES, AND RELATED SYSTEMS AND METHODS
#5MULTI-CELL PISTON MOTION MEMBRANE MICROELECTROMECHANICAL SYSTEMS (MEMS) APPARATUS AND PROCESS
#6MULTIDIMENSIONAL CANTILEVERS AND STRESS-PROGRAMMABLE OUT-OF-PLANE INTERPOSERS FOR 3-D PHOTONIC INTEGRATION AND CONTROL
#7ACCELEROMETER WITH BIAS REDUCTION FEATURE
#8CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
#9METHOD FOR PRODUCING MICROELECTROMECHANICAL STRUCTURES
#10METHOD FOR MANUFACTURING MEMS DEVICE INCLUDING COIL STRUCTURE
#11METHOD FOR FABRICATING AN ENCLOSURE OF A PHOTOACOUSTIC DETECTING DEVICE
#12MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT
#13COMPONENT WITH IMPROVED ADHESIVE BLEED-OUT CLEARANCE
#14PROCESS FOR PRODUCING A PLURALITY OF MEMS TRANSDUCERS WITH ELEVATED PERFORMANCE CAPABILITY
#15MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF MASS ELEMENT AND METHODS FOR FORMING THE SAME
#16SELF-ALIGNED ACOUSTIC HOLE FORMATION IN PIEZOELECTRICAL MEMS MICROPHONE
#17Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators
#18Method for Fabricating a Hermetically Sealed Contact and Hermetically Sealed Contact
#19WAFER-LEVEL PACKAGING STRUCTURE, MANUFACTURING METHOD THEREFOR, AND SENSOR
#20ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR CHIP AND PREPARATION METHOD THEREOF
#21MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND METHODS OF MANUFACTURING THE SAME
#22MEMS GRATING AND FABRICATION METHOD
#23MICRO SYSTEM AND MANUFACTURING METHOD
#24MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUBSTRATES USING SEED LAYERS
#25MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
#26DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
#27LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DESIGN AND MANUFACTURING FLOW
#28INTEGRATED PRESSURE DIAPHRAGMS
#29MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART AND METHODS FOR FORMING THE SAME
#30DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
#31METHODS FOR FABRICATION OF MEMS DEVICE
#32LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
#33SHEAR WAVE MODE PIEZOELECTRIC RESONATOR
#34ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF MAKING
#35ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES, AND RELATED SYSTEMS AND METHODS
#36MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
#37MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#38MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
#39Vibration-Driven Energy Harvesting Element and Method for Manufacturing the Same
#40Method for manufacturing mirror device
#41ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
#42METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
#43MEMS Device and Method for Manufacturing a MEMS Device
#44MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PROCESS OF THE MEMS DEVICE
#45A Method of Manufacturing a MEMS Device
#46CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
#47Method of manufacturing a micro-fluid probe
#48LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME
#49MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
#50Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone
#51Method and structure for CMOS-MEMS thin film encapsulation
#52EXTENDED ACID ETCH FOR OXIDE REMOVAL
#53Method and system for scanning MEMS cantilevers
#54METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER
#55Package structure of micro speaker and method for forming the same
#56METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING A PERIPHERAL WALL MADE OF A MINERAL MATERIAL
#57METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
#58Method for manufacturing implantable electrodes and electrodes made by such methods
#59METHOD OF LIQUID-MEDIATED PATTERN TRANSFER AND DEVICE STRUCTURE FORMED BY LIQUID-MEDIATED PATTERN TRANSFER
#60LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
#61Method for Manufacturing a Microfluidic Device
#62COVER FOR AN INFRARED DETECTOR AND A METHOD OF FABRICATING A COVER FOR AN INFRARED DETECTOR
#63Silicon MEMS gyroscopes with upper and lower sense plates
#64FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS
#65Micro-electromechanical system device using a metallic movable part and methods for forming the same
#66METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIVE PRESSURE SENSOR AND AN INERTIAL SENSOR, AND INTEGRATED SYSTEM
#67Method of forming monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers
#68ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECULAR TRANSPORT
#69Engineered substrates, free-standing semiconductor microstructures, and related systems and methods
#70MEMS microphone and preparation method therefor
#71METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MICROSTRUCTURES
#72THIN FILMS AND METHODS OF FABRICATION THEREOF
#73Microelectromechanical system and process of making it
#74MANUFACTURING METHODS FOR DUAL PORE SENSORS
#75Anti-stiction process for MEMS device
#76Extended acid etch for oxide removal
#77Gas sensor and manufacturing method thereof
#78STABLE LIPID BILAYERS ON NANOPORE ARRAYS
#79Precision fabrication of nanosieves
#80Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
#81MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT
#82Method and structure for sensors on glass
#83CAVITY SOI SUBSTRATE
#84Method for manufacturing semiconductor substrate, method for manufacturing damascene wiring structure, semiconductor substrate, and damascene wiring structure
#85Methods of fabricating micro electro-mechanical systems structures
#86Method for manufacturing a microelectronic device comprising a membrane suspended above a cavity
#87Preparation Method Of Miniature Solid Silicon Needle
#88DEEP CAVITY ETCHING METHOD
#89Method and system for scanning MEMS cantilevers
#90Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
#91Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragm
#92Method for producing microstructures
#93PROCESS FOR MANUFACTURING A DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION, COMPRISING A SUSPENDED DETECTION ELEMENT
#94Method and apparatus for manufacturing microfluidic chip with femtosecond plasma grating
#95Dual back-plate and diaphragm microphone
#96Method with stealth dicing process for fabricating MEMS semiconductor chips
#97Device having a membrane and method of manufacture
#98Method for ablating or roughening wafer surfaces
#99Method for manufacturing a membrane component and a membrane component
#100Method for fabricating semiconductor device
#101Semiconductor integrated device with electrical contacts between stacked dies and corresponding manufacturing process
#102Microelectromechanical system (MEMS) structure and method of formation
#103Patterning method of film, microfluidic device and manufacturing method thereof
#104Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
#105Methods of forming MEMS diaphragms including corrugations
#106Semiconductor device, microphone and methods for forming a semiconductor device
#107Method for manufacturing micromechanical structures in a device wafer
#108Method for manufacturing a plurality of resonators
#109Method of texturing semiconductor substrate, semiconductor substrate manufactured using the method, and solar cell including the semiconductor substrate
#110Method and structure for CMOS-MEMS thin film encapsulation
#111Precision fabrication of nanosieves
#112Microelectromechanical component and method for producing same
#113Microelectromechanical electroacoustic transducer with piezoelectric actuation and corresponding manufacturing process
#114Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
#115Gas sensor, sensor array, and manufacturing method thereof
#116Micro-electro-mechanical system structure and method for fabricating the same
#117MEMS component and production method for a MEMS component
#118STABLE LIPID BILAYERS ON NANOPORE ARRAYS
#119Method of providing a plurality of through-holes in a layer of structural material
#120Bonding pad layer system, gas sensor and method for manufacturing a gas sensor
#121Anti-stiction process for MEMS device
#122Methods of forming MEMS diaphragms including corrugations
#123Dual back-plate and diaphragm microphone
#124Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates
#125Method of manufacturing semiconductor device
#126Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
#127CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
#128Fabrication process for a symmetrical MEMS accelerometer
#129METHOD AND APPARATUS FOR ETCHING A SUBSTRATE
#130Method for fabricating MEMS device integrated with a semiconductor integrated circuit
#131Semiconductor integrated device with electrical contacts between stacked dies and corresponding manufacturing process
#132Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
#133Sensor device and manufacturing method thereof
#134MEMS capacitive pressure sensors in fully depleted semiconductor on insulator (FDSOI)
#135Method for manufacturing a semiconductor die provided with a filtering module, semiconductor die including the filtering module, package housing the semiconductor die, and electronic system
#136Microelectromechanical system (MEMS) structure and method of formation
#137Electrochemical gas sensor constructed with MEMS fabrication technology
#138Pressure sensor generating a transduced signal with reduced ambient temperature dependence, and manufacturing method thereof
#139MEMS method and structure
#140Micro-device having a metal-semiconductor compound layer protected against HF etching and method for making the same
#141MEMS microphone and method of manufacturing the same
#142MEMS microphone and method of manufacturing the same
#143Systems and methods for uniform target erosion magnetic assemblies
#144Anti-stiction process for MEMS device
#145MEMS component and production method for a MEMS component
#146Method for manufacturing micromechanical structures in a device wafer
#147Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#148MEMS microphone and method for manufacturing the same
#149MEMS strain gauge sensor and manufacturing method
#150PRESSURE SENSOR, MANUFACTURING METHOD OF PRESSURE SENSOR, PRESSURE SENSOR MODULE, ELECTRONIC DEVICE, AND VEHICLE
#151Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
#152MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLIQUE SURFACE AND CORRESPONDING MICROMECHANICAL DEVICE
#153Semiconductor device, microphone and methods for forming a semiconductor device
#154Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support
#155MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND CORRESPONDING MICROMECHANICAL WINDOW STRUCTURE
#156SEMICONDUCTOR DEVICES WITH CAVITIES AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICES WITH CAVITIES
#157Semiconductor device, microphone and method for producing a semiconductor device
#158MEMS device integrated with a semiconductor integrated circuit and manufacturing method thereof
#159Semiconductor integrated device with electrical contacts between stacked dies and corresponding manufacturing process
#160Method and structure for CMOS-MEMS thin film encapsulation
#161Method of manufacturing MEMS switches with reduced switching voltage
#162Method of manufacturing MEMS switches with reduced switching voltage
#163Methods of manufacturing for MEMS switches with reduced switching voltage
#164Methods of manufacture for MEMS switches with reduced switching voltage
#165Method for creating patterns
#166Micro-structured atomic source system
#167Semiconductor structure for MEMS Device
#168Field emission devices and methods of making thereof
#169MEMS acoustic transducer with combfingered electrodes and corresponding manufacturing process
#170Fabrication process for a symmetrical MEMS accelerometer
#171Plasma assisted method of accurate alignment and pre-bonding for microstructure including glass or quartz chip
#172Method of manufacturing a switch
#173Method and structure for CMOS-MEMS thin film encapsulation
#174Anodically bonded vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT)
#175MEMS PRESSURE SENSOR WITH MODIFIED CAVITY TO IMPROVE BURST PRESSURE
#176Electromechanical device including connector formed of dielectric material
#177Semiconductor devices with cavities and methods for fabricating semiconductor devices with cavities
#178Micro-structured atomic source system
#179MEMS DEVICE, SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
#180MEMS-based method for manufacturing sensor
#181MEMS-CMOS device that minimizes outgassing and methods of manufacture
#182Method for transferring graphene by attaching removable frame to protective layer applied on a sample containing graphene monolayer
#183Composite cavity and forming method thereof
#184Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#185Pressure sensor generating a transduced signal with reduced ambient temperature dependence, and manufacturing method thereof
#186MEMS method and structure
#187Method of manufacturing silicon nanowire array
#188METHODS FOR FABRICATING HIGH ASPECT RATIO PROBES AND DEFORMING HIGH ASPECT RATIO NANOPILLARS AND MICROPILLARS
#189Manufacture of microneedles
#190Apparatus and method of forming a MEMS device with etch channels
#191Substrate Etch
#192Substrate etch
#193Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS)
#194Method of manufacturing a switch
#195Electronic device, physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
#196Method for the fabrication of thin-film transistors together with other components on a substrate
#197Method of manufacturing a MEMS microphone
#198Method of manufacture MEMS switches with reduced voltage
#199Method of manufacturing MEMS switches with reduced voltage
#200Method of manufacturing MEMS switches with reduced switching voltage
#201Method of manufacturing MEMS switches with reduced switching volume
#202Reduction of chipping damage to MEMS structure
#203Inertial sensor and method of manufacturing the same
#204Method for etching a complex pattern
#205Production process for a micromechanical component and micromechanical component
#206Micropores and methods of making and using thereof
#207Integrated circuit with MEMS element and manufacturing method thereof
#208Field emission devices and methods of making thereof
#209ACTUATOR, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS
#210Micro-reflectron for time-of-flight mass spectrometer
#211Method for creating a micromechanical membrane structure and MEMS component
#212Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer
#213METHODS FOR GRAPHENE-ASSISTED FABRICATION OF MICRO-AND NANOSCALE STRUCTURES AND DEVICES FEATURING THE SAME
#214MEMS element and method for manufacturing same
#215Process for manufacturing a micromechanical structure having a buried area provided with a filter
#216Method of forming suspension object on monolithic substrate
#217Inertial sensor and method of manufacturing the same
#218Wet metal-etching method and apparatus for MEMS device fabrication
#219Dielectric etching
#220Methods and devices for immobilization of single particles in a virtual channel in a hydrodynamic trap
#221Micropores and methods of making and using thereof
#222Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars
#223Methods for fabrication of high aspect ratio micropillars and nanopillars
#224MEMS device and method for manufacturing the same
#225Silicon processing method and silicon substrate with etching mask
#226Laser patterning of glass bodies
#227Method of fabricating micro-vertical structure
#228Method of etching a sacrificial silicon oxide layer
#229MEMS switches with reduced switching voltage and methods of manufacture
#230Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same
#231MICRONEEDLE STRUCTURES AND CORRESPONDING PRODUCTION METHODS EMPLOYING A BACKSIDE WET ETCH
#232SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SUBSTRATES
#233Method for manufacturing floating structure of microelectromechanical system
#234Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
#235Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
#236Structure in a substrate for the manufacturing of a semiconductor device and process for manufacturing of a semiconductor device
#237Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
#238Surfactant-enhanced protection of micromechanical components from galvanic degradation
#239Tiltable-body apparatus, and method of fabricating the same
#240Method for fabricating a three-dimensional acceleration sensor
#241Techniques of anisotropic wet etch micromachining for comb drive transducers and resonance frequency reduction
#242Multiple stage MEMS release for isolation of similar materials
#243Wet etch processing
#244Method of fabricating a biosensor
#245Method of forming a cavity by two-step etching and method of reducing dimension of a MEMS device
#246Method for creating narrow trenches in dielectric materials
#247Method for fabricating a three-dimensional acceleration sensor
#248Method of manufacturing a wiring board
#249Tiltable-body apparatus, and method of fabricating the same
#250Micromachined structures made by combined wet and dry etching
#251Method for fabricating microstructure and microstructure
#252Method for manufacturing a silicon sensor and a silicon sensor
#253Fabrication of silicon micro-mechanical structures
#254Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
#255Method for manufacturing MEMS structures
#256Tiltable-body apparatus, and method of fabricating the same
#257Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
#258Bipolar transistor type MEMS pressure sensor and preparation method thereof
#259Method for forming MEMS cavity structure
#260Wet etch patterning of an aluminum nitride film