84082 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning Processes for removing material
Sub-classes:MICROELECTROMECHANICAL SYSTEMS DEVICE AND MANUFACTURING METHOD THEREOF
#2METHOD OF MANUFACTURE AND ASSEMBLY OF XY FLEXURE MECHANISM ASSEMBLY
#3PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRESPONDING MICROMECHANICAL SENSOR COMPONENT
#4SYSTEMS AND METHODS FOR FABRICATING METALLIC MICROCHANNELS
#5SYSTEMS AND METHODS FOR INTERFACING A METALLIC MICROCHANNEL AND A METALLIC CAPILLARY
#6Manufacturing method of semiconductor structure
#7Plasma assisted method of accurate alignment and pre-bonding for microstructure including glass or quartz chip
#8Process for Producing Air Gaps in Microstructures, Especially of the Air Gap Interconnect Structure Type for Integrated Circuits
#9Process for producing air gaps in microstructures, especially of the air gap interconnect structure type for integrated circuits
#10Method of manufacture and assembly of XY flexure mechanism assembly