84093 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material Focussed beam, i.e. laser, ion or e-beam
POLYMER NANOFIBER ENVIRONMENTAL BARRIER STRUCTURE
#2METHOD AND DEVICE FOR PRODUCING NANOPORES
#3ACCELEROMETER WITH BIAS REDUCTION FEATURE
#4METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS WITH SUCH A LAYERED STRUCTURE
#5ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
#6BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
#7MICROPATTERNING METHOD, MICROPATTERNING APPARATUS AND MICROPATTERNING CHIP FOR SILICONE-BASED ELASTOMER
#8METHOD FOR FORMING A BORE FOR A CAVITY ARRANGED WITHIN A SEMICONDUCTOR LAYER STACK
#9METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE COMPOSED OF HARD BRITTLE MATERIAL
#10MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A MEMBRANE SPRING
#11INTEGRATED PRESSURE DIAPHRAGMS
#12Electrical contacts using an array of micromachined flexures
#13STRAIN SENSOR SWITCH FOR TIMING BASED SENSING
#14MANUFACTURING METHOD OF MEMS DEVICE
#15THIN-FILM CRYSTALLINE STRUCTURE WITH SURFACES HAVING SELECTED PLANE ORIENTATIONS
#16FLUID SENSOR SYSTEM
#17MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME
#18MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
#19CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM (MEMS)
#20Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices
#21Bonding process for forming semiconductor device structure
#22FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS
#23SENSOR PACKAGE WITH EMBEDDED INTEGRATED CIRCUIT
#24Method for producing fine structures in the volume of a substrate composed of hard brittle material
#25Fluid sensor system
#26Micropatterning method, micropatterning apparatus and micropatterning chip for silicone-based elastomer
#27Photothermal conversion element, method of manufacturing the same, photothermal power generator, and microscopic object collection system
#28MICROFLUIDIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
#29Method for producing microstructures in a glass substrate
#30Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
#31Bonding process for forming semiconductor device structure
#32Thin-film crystalline structure with surfaces having selected plane orientations
#33PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME
#34Method and structure for sensors on glass
#35Methods of fabricating micro electro-mechanical systems structures
#36Method for producing microstructures
#37Method and apparatus for manufacturing microfluidic chip with femtosecond plasma grating
#38Method with stealth dicing process for fabricating MEMS semiconductor chips
#39Microstructure and method for manufacturing same
#40Capless semiconductor package with a micro-electromechanical system (MEMS)
#41Fabricating calcite nanofluidic channels
#42Laser-assisted material phase-change and expulsion micro-machining process
#43MEMS device with particle filter and method of manufacture
#44Transparent material processing method, transparent material processing device, and transparent material
#45MEMS microphone with acoustic relief channels
#46Vertical nanopore coupled with a pair of transverse electrodes having a uniform ultrasmall nanogap for DNA sequencing
#47Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
#48Bonding process for forming semiconductor device structure
#49Fabricating calcite nanofluidic channels
#50Bonding pad layer system, gas sensor and method for manufacturing a gas sensor
#51PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME
#52Method for producing at least one recess in a material by means of electromagnetic radiation and subsequent etching process
#53Method for producing fine structures in the volume of a substrate composed of hard brittle material
#54Sensor characteristic evaluation method and charged particle beam device
#55Devices with localized strain and stress tuning
#56Bonding process for forming semiconductor device structure
#57Semiconductor sensor device and method for fabricating the same
#58Inorganic wafer having through-holes attached to semiconductor wafer
#59Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus
#60Passive wireless pressure sensor for harsh environments
#61Manufacturing method of MEMS sensor
#62Method for manufacturing a micromechanical inertial sensor
#63MEMS manufacturing method and MEMS manufacturing apparatus
#64METHOD OF FORMING AN ON-PITCH SELF-ALIGNED HARD MASK FOR CONTACT TO A TUNNEL JUNCTION USING ION BEAM ETCHING
#65MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND CORRESPONDING MICROMECHANICAL WINDOW STRUCTURE
#66System and method for wafer-scale fabrication of free standing mechanical and photonic structures by ion beam etching
#67SILICON SUBSTRATE PROCESSING METHOD, ELEMENT EMBEDDED SUBSTRATE, AND CHANNEL FORMING SUBSTRATE
#68Inorganic wafer having through-holes attached to semiconductor wafer
#69Process for the manufacture of custom optical elements
#70Microstructure processing method and microstructure processing apparatus
#71Method of manufacturing a plurality of through-holes in a layer of first material
#72Method of fabricating a diamond membrane
#73Pressure sensor die over pressure protection for high over pressure to operating span ratios
#74Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser
#75SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE
#76Method for fabricating suspended MEMS structures
#77MEMS chip and method of manufacturing a MEMS chip
#78Method of manufacturing a MEMS microphone
#79Method of forming an on-pitch self-aligned hard mask for contact to a tunnel junction using ion beam etching
#80SERS-sensor with nanostructured layer and methods of making and using
#81Method for creating a resonator
#82Aerogel-based mold for MEMS fabrication and formation thereof
#83METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE BODY
#84Process for the manufacture of custom optical elements
#85Photostructured magnetic devices and methods for making same
#86Component of a biosensor and process for production
#87Patterning of antistiction films for electromechanical systems devices
#88PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE
#89System and methods for preparing freestanding films using laser-assisted chemical etch, and freestanding films formed using same
#90Method of manufacturing a switch system
#91FREE FORM PRINTING OF SILICON MICRO- AND NANOSTRUCTURES
#92SELF-ASSEMBLY OF LITHOGRAPHICALLY PATTERNED POLYHEDRAL NANOSTRUCTURES AND FORMATION OF CURVING NANOSTRUCTURES
#93Laser processing method
#94Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer
#95Chip, method for producing a chip and device for laser ablation
#96Systems and methods for preparing freestanding films using laser-assisted chemical etch, and freestanding films formed using same
#97Bonded microelectromechanical assemblies
#98System and method for precision fabrication of micro- and nano-devices and structures
#99Micromechanical component and method for manufacturing a micromechanical component
#100Process and system for fabrication of patterns on a surface
#101Method of making an embedded electromagnetic device
#102Manufacturing method of semiconductor device including etching step
#103Bonded Microelectromechanical Assemblies
#104Method for manufacturing an intergrated pressure sensor
#105Laser patterning of glass bodies
#106Method for production of packaged electronic components, and a packaged electronic component
#107Getter formed by laser-treatment and methods of making same
#108Aerogel-bases mold for MEMS fabrication and formation thereof
#109Production of microfluidic devices using laser-induced shockwaves
#110Dry etching method, fine structure formation method, mold and mold fabrication method
#111High resolution plasma etch
#112Method of fabricating tridimensional micro- and nanostructures as well as optical element assembly having a tridimensional convex structure obtained by the method
#113METHOD OF CREATING SOLID OBJECT FROM A MATERIAL AND APPARATUS THEREOF
#114METHOD FOR FORMING NANOSCALE FEATURES AND STRUCTURES PRODUCED THEREBY
#115Nanomachined mechanical components using nanoplates, methods of fabricating the same and methods of manufacturing nanomachines
#116Precision position determining method
#117Ion implanted microscale and nanoscale device method
#118Method and apparatus for controlled manufacturing of nanometer-scale apertures
#119Laser assisted chemical etching method for release microscale and nanoscale devices
#120Method for manufacturing a patterned structure
#121Method of manufacturing a microstructure
#122Method of producing a microfluidic device
#123Precision machining method using a near-field scanning optical microscope
#124Method for the removal of a microscopic sample from a substrate
#125Anisotropic dry etching of Cu-containing layers
#126Minute three dimensional structure producing apparatus and method
#127Method for forming nanoscale features and structures produced thereby
#128Method for nanomachining high aspect ratio structures
#129Pulsed ion beam control of solid state features
#130Online trimming device and method for micro-shell resonator gyroscope
#131Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays
#132Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device
#133Method for forming a microfabricated structure
#134Precision substrate material removal using miniature-column charged particle beam arrays
#135Precision substrate material removal using miniature-column charged particle beam arrays