84094 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material Spark erosion
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
#2Electrical contacts using an array of micromachined flexures
#3Shaping nanomaterials by short electrical pulses
#4Method for ablating or roughening wafer surfaces
#5Method of manufacturing MEMS switches with reduced switching voltage
#6Method of manufacturing MEMS switches with reduced switching voltage
#7Methods of manufacturing for MEMS switches with reduced switching voltage
#8Methods of manufacture for MEMS switches with reduced switching voltage
#9Method of manufacturing a switch
#10Method of manufacture MEMS switches with reduced voltage
#11Method of manufacturing MEMS switches with reduced switching voltage
#12Method of manufacturing MEMS switches with reduced switching volume
#13MEMS switches with reduced switching voltage and methods of manufacture
#14Apparatus and Method for Nano-Scale Electric Discharge Machining