84095 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Processes for removing material Processes for removing material not provided for in -
Forming Antirelaxation Coatings on Interior Surfaces of Vapor Cells
#2HIGH SPEED MANUFACTURE OF MICRO-ELECTRICAL MECHANICAL SYSTEMS ARRAYS
#3BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
#4MANUFACTURING METHOD OF MEMS DEVICE
#5CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM (MEMS)
#6METHOD OF MANUFACTURING MIRROR DEVICE
#7Bonding process for forming semiconductor device structure
#8Deep etching substrates using a bi-layer etch mask
#9HERMETICALLY SEALED TRANSPARENT CAVITY AND PACKAGE FOR SAME
#10Bonding process for forming semiconductor device structure
#11Microstructure and method for manufacturing same
#12Capless semiconductor package with a micro-electromechanical system (MEMS)
#13Fabrication of 3D microelectrodes and use thereof in multi-functional biosystems
#14Bonding process for forming semiconductor device structure
#15System and method for forming a biological microdevice
#16Bonding process for forming semiconductor device structure
#17Method of fabricating a diamond membrane
#18Chip structure
#19Method for etched cavity devices
#20Machine and method for machining a part by micro-electrical discharge machining
#21Methods for Manufacturing a Microstructure
#22Method for treating the surface of an electrically conducting substrate surface
#23Vertical indent production repair
#24Process for creating a 3-dimensional configuration on a substrate